中国物理学会期刊网
中国物理学会期刊网
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Dynamic Laser-Materials Interaction and Its Applications for Precision Engineering 报告人:洪明辉
发布时间:2015-09-24   关键词:
 



报告摘要:Laser precision engineering has unique advantages as a non-contact process with flexible setup and high speed processing in air, vacuum or liquid environment. In the last decades, we have witnessed its extensive applications in the fields from academic researches to production lines [1]. In this talk, our research progress on dynamic laser-materials interaction and the signal diagnostics in real time will be reviewed. How to achieve small heat affected zone (HAZ) is a key issue in high quality laser microprocessing and nano-manufacturing. Hybrid laser processing can lead to laser precision engineering of difficultly processing substrates, such as heat sensitive and ultra-thin substrate devices. Optimization of laser-materials interaction can provide us novel approaches to overcome optical diffraction limit for sub-wavelength surface patterning. Combined with advanced AFM and NSOM means, laser processing resolution can be pushed down to sub-50 nm [2]. To solve the technical bottleneck of slow laser nanoprocessing, parallel (multi-beam) and maskless laser processing techniques are developed. Potential and challenges of laser-materials interaction to cater for 22nm and beyond based on laser produced plasma (LPP) EUV light source and flexible laser manipulation of atom deposition for atomic engineering will also be discussed.
References:
[1] M.H. Hong, "Laser Precision Engineering", Industrial Laser Solutions, May, 17, (2007).
[2] M.H. Hong, "Laser Applications in Nanotechnology", Oxford Handbook of Nanoscience and Technology, (Oxford University Press, 2010), pp. 860-886.


中国物理学会期刊网