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高气压直流辉光CH4/H2等离子体的气相过程诊断*

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郑仕健, 丁芳, 谢新华, 汤中亮, 张一川, 李唤, 杨宽, 朱晓东. 2013: 高气压直流辉光CH4/H2等离子体的气相过程诊断*, 物理学报, null(16): 165204. doi: 10.7498/aps.62.165204
引用本文: 郑仕健, 丁芳, 谢新华, 汤中亮, 张一川, 李唤, 杨宽, 朱晓东. 2013: 高气压直流辉光CH4/H2等离子体的气相过程诊断*, 物理学报, null(16): 165204. doi: 10.7498/aps.62.165204
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Zheng Shi-Jian, Ding Fang, Xie Xin-Hua, Tang Zhong-Liang, Zhang Yi-Chuan, Li Huan, Yang Kuan, Zhu Xiao-Dong. 2013: A diagnosis of gas-phase processes in a high pressure DC CH4/H2 plasma*, Acta Physica Sinica, null(16): 165204. doi: 10.7498/aps.62.165204
Citation: Zheng Shi-Jian, Ding Fang, Xie Xin-Hua, Tang Zhong-Liang, Zhang Yi-Chuan, Li Huan, Yang Kuan, Zhu Xiao-Dong. 2013: A diagnosis of gas-phase processes in a high pressure DC CH4/H2 plasma*, Acta Physica Sinica, null(16): 165204. doi: 10.7498/aps.62.165204
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高气压直流辉光CH4/H2等离子体的气相过程诊断*

  • 中国科学技术大学近代物理系，中国科学院基础等离子体物理重点实验室，合肥 230026

A diagnosis of gas-phase processes in a high pressure DC CH4/H2 plasma*

  • 摘要: 　　对高气压(约100 Torr)直流辉光碳氢等离子体的气相过程进行了光谱和质谱原位诊断。在高气压下,等离子体不同区域光发射特性存在明显差异。正柱区存在着以C2和CH为主的多个带状谱和分立谱线,阳极区粒子发射谱线明显减少,而在阴极区则出现大量复杂的光谱成分,表明高气压情形下等离子体与阴极间强烈的相互作用将导致复杂的原子分子过程。从低气压到高气压演变过程中,电子激发温度降低而气体分子转动温度升高。在高气压下,高甲烷浓度导致C2, C2H2及C2H4增多而C2H6减少。表明在高气压条件下,气体温度对气相过程的影响作用显著增强。
    Abstract: In this work, gas phase processes in a high pressure (～100 Torr) DC hydrocarbon plasma are investigated in situ by optical emission spectroscopy and mass spectroscopy. In the high pressure plasma, optical emission characteristics of glow layers are obviously different. C2, CH dominated band spectra and discrete spectra are distinctively observed in the positive column, whereas the emission intensity is found to decrease in the anode region. In the cathode region, a large number of complicated spectra are detected, which indicates the intensive interaction between the cathode and plasma under high pressure induces complicated atomic and molecular processes. With the the increase of pressure, electron excitation temperature decreases while gas rotational temperature goes up. High methane concentration causes increases in C2, C2H2 and C2H4 but a reduction in C2H6. Those suggest that the effect of gas temperature on gas phase process is significantly enhanced under high pressure.
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  • 刊出日期:  2013-08-30

高气压直流辉光CH4/H2等离子体的气相过程诊断*

  • 中国科学技术大学近代物理系，中国科学院基础等离子体物理重点实验室，合肥 230026

摘要: 　　对高气压(约100 Torr)直流辉光碳氢等离子体的气相过程进行了光谱和质谱原位诊断。在高气压下,等离子体不同区域光发射特性存在明显差异。正柱区存在着以C2和CH为主的多个带状谱和分立谱线,阳极区粒子发射谱线明显减少,而在阴极区则出现大量复杂的光谱成分,表明高气压情形下等离子体与阴极间强烈的相互作用将导致复杂的原子分子过程。从低气压到高气压演变过程中,电子激发温度降低而气体分子转动温度升高。在高气压下,高甲烷浓度导致C2, C2H2及C2H4增多而C2H6减少。表明在高气压条件下,气体温度对气相过程的影响作用显著增强。

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