连续相位板面形的随机特性研究
Surface sto chastic characteristics of continuous phase plate
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摘要: 根据连续相位板面形分布的随机特性,利用自相关函数和相关长度对其面形特性进行了分析。采用一个高斯型随机分布函数推导了相关长度与连续相位板远场分布之间的解析关系。利用数值算法计算了连续相位板远场分布的方差和能量利用率,并计算了不同的相关长度对连续相位板远场分布的具体影响。结果表明,连续相位板的相关长度越小,远场分布均匀性越好,焦斑形态更加接近于目标焦斑,同时具有较高的能量利用率。Abstract: According to the stochastic behavior of the continuous phase plate (CPP) surface shape distribution, the autocor-relation function and the correlation length are used to analyze its surface shape characteristics. A Gaussian random distribution function is used to derive the analytic relation between the correlation length and the far-field distribution of CPP. Numerical algorithm is used to calculate the variance and the energy usage rate of CPP’s far-field distribution, and also the specific influence of correlation length on far-field distribution of CPP. The conclusion is that the smaller the correlation length, the better the homogeneity of far-field distribution is, and the closer to the target spot the shape of the focal spot will be, and at the same time the higher the energy usage rate will be.
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