高能电子照射绝缘样品的泄漏电流特性

李维勤; 刘丁; 张海波

doi:10.7498/aps.63.227303

高能电子照射绝缘样品的泄漏电流特性

西安理工大学自动化与信息工程学院,西安,710048

西安交通大学电子科学与技术系，电子物理与器件教育部重点实验室，西安 710049

Leakage current characteristics of the insulating sample under high-energy electron irradiation

摘要: 建立了考虑电子散射、输运、俘获和自洽场的数值计算模型，研究了高能电子束照射下绝缘厚样品的泄漏电流特性，并采用一个实验平台测量了泄漏电流。结果表明：在电子束持续照射下，电子总产额会下降；由于电子在样品内部的输运，样品近表面呈现微弱的正带电，在样品内部呈现较强的负带电；样品内部电子会向下输运形成电子束感生电流，长时间照射下会形成泄漏电流；随着照射，泄漏电流逐渐增大并趋于稳定值；泄漏电流随样品厚度的增大而减小，随电子束能量、电子束电流的增大而增大。

关键词:

Abstract: The leakage current characteristics of an insulating sample under high-energy electron beam irradiation are simulated by a numerical model with taking into account the electron scattering, transport, trapping and self-consistent field.The leakage current is measured by using a detection platform. Results show that under the continuous electron beam irradiation, the total electron yield decreases evidently; because of electron transport, the sample near the surface is positively charged weakly and its interior is negatively charged strongly; some electrons are transported downward, forming the electron beam induced current and the leakage current under the long time irradiation. Under the irradiation, the leakage current increases to a stable level gradually. The leakage current decreases with the increase of sample thickness, but it increases with beam energy and current.

高能电子照射绝缘样品的泄漏电流特性

西安理工大学自动化与信息工程学院,西安,710048

西安交通大学电子科学与技术系，电子物理与器件教育部重点实验室，西安 710049

关键词:

Leakage current characteristics of the insulating sample under high-energy electron irradiation

西安理工大学自动化与信息工程学院,西安,710048

西安交通大学电子科学与技术系，电子物理与器件教育部重点实验室，西安 710049

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