多铁性纳米点结构及微纳器件应用

高兴森; 曾敏; 刘俊明

doi:10.7693/wl20140404

多铁性纳米点结构及微纳器件应用

华南师范大学先进材料研究所及量子调控工程与材料广东省重点实验室广州 510006

南京大学固体微结构国家实验室南京 210093

Multiferroic nanodot structures and their applications in micro/nano devices

摘要: 在当前电子技术微型化和高度集成化的趋势下，多铁性纳米材料的研究正逐渐成为一个重要主题。这方面的研究还处在起步阶段，在材料的制备工艺和表征手段方面还面临诸多挑战。文章简要介绍了多铁性纳米点的制备工艺(包括离子刻蚀、自组构、多孔氧化铝模板方法等)和以多功能扫描探针为代表的表征手段，还介绍了纳米点带来的新颖的物理现象及其在微纳器件应用等方面的研究进展。

关键词:

Abstract: With the ever increasing development of miniaturization and integration technolo-gies in the microelectronics industry, nanoscale multiferroics have attracted more and more atten-tions. However, there are still several challenges hinter their applications, especially in nanoscale fabrication and characterization methods. We present a brief overview on the current progress in multiferroic nanodots, covering nano-patterning (including self-assembly, focused ion beam lithogra-phy, and anodic aluminium oxide template mask assisted deposition), nanoscale characterization techniques (in particular multifunctional scanning probe microscopy), novel physical properties in-volved in nanodots, as well as related multiferroic nano/micro-device applications.

多铁性纳米点结构及微纳器件应用

华南师范大学先进材料研究所及量子调控工程与材料广东省重点实验室广州 510006

南京大学固体微结构国家实验室南京 210093

关键词:

Multiferroic nanodot structures and their applications in micro/nano devices

华南师范大学先进材料研究所及量子调控工程与材料广东省重点实验室广州 510006

南京大学固体微结构国家实验室南京 210093

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