摘要:
该文针对现有压电马达应用于扫描探针显微镜时,难以在恶劣条件下获得高品质原子分辨率图像的问题,介绍了文章作者近年研制的新型小尺寸大推力压电马达,其中包括:壁虎马达、熊猫马达、金枪鱼马达和蜘蛛马达以及它们的一些压电片叠堆型设计,给出了它们的结构图、实物照片和工作原理.文章还讨论了如何利用它们制成高质量的扫描隧道显微镜(STM)和磁力显微镜(MFM),并特别展示了用这种STM在无隔音、无减震条件下,甚至在强振动干扰的恶劣条件下测得的高清晰原子分辨率图像.虽然这些高品质原子分辨率成像主要是由壁虎马达制成的STM给出的,但金枪鱼马达具有更强的输出推力,具有在更恶劣条件下的应用潜力.蜘蛛马达是一种惯性马达,但能够比传统惯性马达输出更强的推力,所以也具有在恶劣条件下应用的潜力.
Abstract:
It is difficult to obtain high quality atomic resolution images under harsh con-ditions when using current piezoelectric motors to build a scanning probe microscope. This arti-cle introduces several new types of compact piezoelectric motors with high output force that we developed recently, including GeckoDrive, PandaDrive, TunaDrive, SpiderDrive, and their varia-tions, implemented using piezo plate stacks. Their structures, photographs, operation principles, and how they are adopted to build high quality scanning tunneling and magnetic force micro-scopes are presented. Of particular note are the high clarity, atomically resolved, scanning tun-neling microscope (STM) images obtained without using any sound or vibration isolation, even in the extremely strong vibration environment inside a water-cooled magnet. Although these STM images were mainly taken using GeckoDrive, the TunaDrive can actually output bigger force, thus showing better promise in harsh condition applications. The SpiderDrive is a type of inertial piezoelectric motor, but it can output stronger force than traditional inertial motors so it also has good potential for imaging under harsh conditions.
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