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原位溅射型单次试开密码鉴别电路
In-situ sputtering type single-try discriminator circuit
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摘要: 针对目前微机电系统密码锁中的鉴别器结构复杂、智能电子密码锁可靠性不高的问题，设计了一种 N bit 的原位溅射型单次试开密码鉴别电路。N bit 的密码鉴别电路，由2N (N 级、每级2个)个原位溅射型 OFF-ON 开关按照每级“二选一”的逻辑、N 级级联的形式构成；将原位溅射型 OFF-ON 开关(OFF 态到 ON态的单向切换具有不可逆特性)与具有熔断特性的保险丝按照装定密码对应的电路关系进行连接，构成了原位溅射型单次试开固态密码锁，可将此密码锁用于对安全性要求高的要害系统、设施中。为了获得原位溅射型OFF-ON 开关中金属爆炸箔与叉指电极之间的间隙，给出了三种固态密码鉴别电路的微加工工艺方案。Abstract: As the structure of discriminator in the current micro-electromechanical system combination lock is complex and the reliability of electronic combination locks is poor,we designed an N bit in-situ sputtering single-try discrimination circuit to solve these problems.The N bit discrimination circuit is composed of 2N (N-stage,two switches per stage)sputtering type OFF-ON switches and formed by alternative logic of each stage and N-stage series.The sputtering type OFF-ON switches (the one-way switch of the OFF state to ON state is irreversible)and the fuse having a fusing characteristic are connected by the corre-sponding relationship between setting password and the circuit to form in-situ sputtering and single-try solid combination lock which can be used in high security key systems and facilities.In order to ensure a space between the metal exploding foil and the interdigital electrode,three different micromachining process methods of the discrimination circuit are presented.
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