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硅异质结电池衬底形貌的修饰及其在电池中的应用研究*
Mo dification of surface morphology of a textured silicon substrate and its application in hetero junction solar cells
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摘要: 对单晶硅衬底制绒可有效增强其陷光作用，提高硅异质结太阳电池的短路电流.但在沉积非晶硅的过程中，制绒衬底的金字塔沟壑处易出现两相式外延生长，降低电池输出特性参数.对此本文采用两种方法修饰制绒衬底的微观形貌，并将其分别应用到硅异质结太阳电池的制备当中.通过混酸溶液对碱制绒后的衬底进行平滑处理，使金字塔形貌更加平滑，电池开路电压由564.6 mV提高到609.4 mV.此外，采用四甲基氢氧化铵替代碱溶液，发现制绒后的衬底不仅具有良好的陷光效果，且其形貌更为平滑，使得电池的开路电压和转换效率均有明显提升.Abstract: Texture on a mono-crystalline silicon substrate can effectively enhance the light trapping, and increase the short-circuit current of silicon hetero-junction solar cell. However, when the amorphous silicon layer deposited on the crystalline silicon substrate, the amorphous and crystalline epitaxial growth of mixed phases is created in the valleys with sharp edges, which leads to reducing the output characteristic parameters of the solar cell. In this paper, we use two methods to modify the microstructure of the textured substrate, and apply them to the silicon heterojunction solar cell. The textured silicon substrate is smoothed through the mixed acid, which makes the pyramid shape become round off and the open circuit voltage of the solar cell change from 564.6 mV to 609.4 mV. In addition, we use tetramethyl ammonium hydroxide (TMAH) instead of alkali solution. It is found that the textured substrate has an effective light trapping, and its micro-morphology is more rounded, the short-circuit current and open circuit voltage of the solar cell have been improved significantly.
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