射频电感耦合夹层等离子体中的模式转换

杜寅昌; 曹金祥; 汪建; 郑哲; 刘宇; 孟刚; 任爱民; 张生俊

射频电感耦合夹层等离子体中的模式转换

中科院基础等离子体物理重点实验室,中国科学技术大学近代物理系,合肥230026

试验物理与计算数学实验室,北京,100076

Mode transition of inductively coupled plasma in interlayer chamber

摘要: 本文利用微波相位法和光谱诊断法，研究了ICP放电等离子体在圆台状夹层等离子体中E模和H模相互转换的物理现象．E模和H模的之间转换过程是一个瞬间突变的，转换点的输入功率随真空室压强的变化而变化．H模向E模转换的阈值功率低于E模向H模转换的值，等离子体参数随输入功率变化曲线类似于铁磁物质中的磁滞回线．Ar∏408．2nm谱线的强度的变化规律和电子密度随功率变化的规律基本一致．通过本实验可以获得一种电子密度范围为3．85×1011cm-3〈ne〈4．68×1011cm-3，外表面积为0．3m2，厚度为2cm稳定工作的等离子体源．

关键词:

Abstract: We do some research on E-H mode transition of inductively coupled plasma (ICP) in the interlayer chamber, using the microwave phase and plasma spectrum diagnotic technique. The mode transition between E and H mode is a sudden changes phenomenon. The input power of the transition varies as the pressure changes in the chamber. The transition power from H to E is less than from E to H, so the hysteresis in power hence is established. The change of the relative spectral intensity is basically the same the variation of the electron density with input power. We obtain a stable plasma source, with an electron density ranging from 3.85× 1011 cm-3 to 4.68×1011 cm-3, an outer surface area of 0.3 m2, and a thickness of 2 cm.

射频电感耦合夹层等离子体中的模式转换

中科院基础等离子体物理重点实验室,中国科学技术大学近代物理系,合肥230026

试验物理与计算数学实验室,北京,100076

关键词:

Mode transition of inductively coupled plasma in interlayer chamber

中科院基础等离子体物理重点实验室,中国科学技术大学近代物理系,合肥230026

试验物理与计算数学实验室,北京,100076

Keywords:

全文HTML

参考文献 (0)