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A12o3钝化及其在晶硅太阳电池中的应用
The passivation of A1203 and its applications in the crystalline silicon solar cell
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摘要: 介绍了A1203的材料性质及其原子层沉积制备方法，详细阐述了该材料的钝化机制（化学钝化和场效应钝化），并从薄膜厚度、热稳定性及叠层钝化等角度阐释其优化方案．概述了Al203钝化在晶体硅太阳电池中的应用，主要包括钝化发射极及背面局部扩散电池和钝化发射极及背表面电池．最后，对A1203钝化工艺的未来研究方向和大规模的工业应用进行了展望．
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关键词:
- 氧化铝(A1203) /
- 原子层沉积 /
- 晶硅太阳电池 /
- 钝化
Abstract: The material characteristics and one of the preparation methods, atomic layer deposition of A12 O3 are introduced. The passivation mechanisms (chemical passivation and field-effect passivation) of A1203 films are demonstrated comprehensively, and optimization methods from the angles of film thickness, thermal stability and stack passivation are illuminated. The application of A12 Oa passivation in the crystalline silicon solar cell is provided, including passivated emitter rear locally diffused cell and passivated emitter and rear cell. Finally, the future study of the A1203 passivation process and the application to industry production are proposed. -
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