Keywords: 
• 钪膜 /
• 氘化 /
• 氦离子注入 /
• 表面形貌

Abstract: The effects of deuteration and helium-implantation on the surface morphology and phase structure of scandium （Sc） thick film are investigated by X-ray diffraction （XRD）, Scanning Electron Microscopy （SEM） and Atomic Force Microscopy （AFM） methods. The preferred orientation of （002） crystal plane is observed for both films deposited on substrates of monocrystalline-silicon and polished- molybdenum. A great number of holes appear on surface after deuteration and the grain size of ScD2 is bigger than that of Sc, whereas a few ScDo.33/Sc grains with relatively small grain size retain inside crystal. The surface morphologies of scandium and scandium deuteride films are slightly affected by helium-implantation. The formation of helium bubbles with a preferred orientation in the crystal lattice of scandium and scandium deuteride, generated by the aggregation of ion-implanted helium, causes the corresponding diffraction peaks of scandium and scandium deuteride phase to shift towards smaller angles.