极化诱导实现AlGaN薄膜材料中的超高电子浓度（10^20cm^-3）掺杂
- 电子科技大学光电信息学院 电子薄膜与集成器件国家重点实验室,成都,610054
摘要: 材料的载流子浓度和迁移率是影响器件性能的关键因素，变温Hall测试结果证明杂质掺杂AlGaN中的载流子浓度和迁移率随温度降低而减小．然而极化诱导掺杂的载流子浓度和迁移率不受温度变化的影响．以准绝缘的GaN体材料作为衬底，在组分分层渐变的AlGaN中实现的极化诱导掺杂浓度仅仅在10^17 cm^-3数量级甚至更低．本研究采用载流子浓度为10^-16 cm^-3量级的非有意n型掺杂GaN模板为衬底，用极化诱导掺杂技术在分子束外延生长的AlGaN薄膜材料中实现了高达10^20cm^-3量级的超高电子浓度．准绝缘的体材GaN半导体作衬底时，只有表面自由电子作为极化掺杂源，而非有意掺杂的GaN模板衬底除了提供表面自由电子外，还能为极化电场提供更多的自由电子“源”，从而实现超高载流子浓度的n型掺杂．
Polarization induced ultra-high electron concentration up to 10^20 cm^-3 in graded AlGaN
- 电子科技大学光电信息学院 电子薄膜与集成器件国家重点实验室,成都,610054
Abstract: Carrier concentration and mobility of materials are key factors affecting device performance. Hall tests at different temperatures demonstrate that the carrier concentration and mobility in impurity-doped AIGaN decrease with temperature decreasing. However, carrier concentration and mobility obtained by polarization-induced doping are independent of temperature. Using quasi-insulating GaN as substrate, the electron concentration obtained in the linearly graded AlGaN film through impurity-doping is only 10-17 cm-3 or less. In this study, using unintentional impurity doped （n-type, 10-16 cm-3） GaN template, graded A1GaN film is grown by molecular beam epitaxial, in which polarization induced ultra-high electron concentration is up to 10^20 cm-3 in graded AlGaN film without using any dopant. Using quasi-insulating GaN as substrate, only the surface of the free electrons serves as polarization dopant, while unintentionally doped GaN template is used as a substrate, in addition to free electrons on surface/interface, it is also reasonable to surmise more negative charges attracted by polarization electric field to be the source of polarization doping, in the unintentional doped GaN template, thereby achieving an ultra-high carrier concentration via polarization induced n-type doping.
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