Keywords: 
• 热传导 /
• 薄膜热导率 /
• ANSYS

Abstract: Thermal conductivity is one of the most important physical properties of thin films.Different from two-or three-dimensional measurement structures in most reports,in this work,one-dimensional（1D） two-end supported cantilever beam is provided.The structure of cantilever includes a metal heater（which also serves as a thermometer） and thin film（s） underneath for measurement. 1D heat flow equation is employed to obtain the expression of temperature rise distribution（△T（x） along the cantilever beam and voltage drop changes along the heater（△U） when a direct current（DC） follows in the heater.To confirm the correctness of theoretical deduction,ANSYS finite element software is employed to simulate△T（x） and△U.Results demonstrate that the simulations are in good agreement with the theoretic calculations obtained from expressions of△T（x） and△U.Compared with conventional 3-times frequency（3ω） method,the DC method with 1D cantilever beam is relatively simple and accurate.