Keywords: 
• 介质阻挡放电 /
• 超四边形斑图 /
• 等离子体参量

Abstract: Dielectric barrier discharge is an important method of producing nonequilibrium low-temperature plasma.Measurement of the plasma parameters is highly valuable for its industrial application.Plasma parameters of square superlattice pattern are investigated by optical emission spectroscopy in a dielectric barrier discharge by using a two-liquid-electrode dielectric barrier discharge device in argon at atmospheric pressure.It is found that the light intensity of the large diameter microdischarge channel（big dot） is different from that of the small diameter channel（small dot）.Vibrational temperature is investigated by using the N_2 second positive spectrum. Electronic excitation temperature is measured by means of spectral line intensity ratio.Electron density is obtained by using the stark broadening of Ar atom 696.54 nm spectral line.The results show that the electron density and the vibrational temperature of the small dot are larger than those of the big dot but the electronic excitation temperature is lower than that of the big dot.It is suggested that the plasma state of the big dot is different from that of the small dot in the stable square superlattice pattern.