摘要:
利用反应磁控溅射方法在单晶硅和高速钢（W18Cr4V）基片上制备出不同C含量Ti-B-C-N纳米复合薄膜.使用X射线衍射和高分辨透射电子显微镜研究了Ti-B-C-N纳米复合薄膜的组织和微观结构,用纳米压痕仪测试了它们的硬度和弹性模量.结果表明,利用往真空室通入C2H2气体的方法制备得到的Ti-B-C-N纳米复合薄膜中,在所研究成分范围内只发现TiN基的纳米晶.当C2H2流量较小时,C元素的加入可以促进Ti-B-C-N薄膜的结晶,使晶粒有所增大,力学性能得到提高;当晶粒尺寸约为6nm时（C2H2流量为2cm3/min）,Ti-B-C-N薄膜的硬度、弹性模量和断裂韧性均达到最大值,分别为35.7GPa,363.1GPa和2.46MPa·m1/2;进一步增加C含量,薄膜力学性能将急剧降低.
Abstract:
Ti-B-C-N nanocomposite coatings with different C quantities are deposited on Si（100） and high speed steel （W18Cr4V） substrates by the closed-field unbalanced reactive magnetron sputtering in the mixture of argon,nitrogen and acetylene gases.The microstructures of Ti-B-C-N nanocomposite coatings are characterized by X-ray diffraction and high-resolution transmission electron microscopy;while the nanohardness and elastic modulus values are measured by the nano-indention method.The results indicate that in the studied composition range,the deposited Ti-B-C-N nanocomposite coatings are found still only in the TiN base nanocrystalline.When the C2H2 flux is small,adding C can promote crystallization of Ti-B-C-N nanocomposite coatings,and the grain can be increased to improve the mechanical properties,when the grain size of about 6 nm （C2H2 flux rate 2 cm3/min）,hardness,elastic modulus and fracture toughness of Ti-B-C-N nanocomposite coatings achieve the maximum,respectively,35.7 GPa,363.1 GPa and 2.46MPa·m1/2;the further increase of the C content of Ti-B-C-N nanocomposite coating can reduce mechanical properties of coating dramatically.
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