超灵敏度检漏仪校准技术进展

王汐月; 卢耀文; 陈千睿; 董云宁; 魏萌萌; 杨传森; 闫睿; 齐京

doi:10.13922/j.cnki.cjvst.202111011

[1]

Peters J L. An ultra-sensitive mass spectrometer leak detector and its application to vacuum technology[J]. Vacuum Technology Transactions,2013:94−96

[2]

Jau Y Y,Partner H,Schwindt P D,et al. Low-power, miniature 171Yb ion clock using an ultra-small vacuum package[J]. Applied Physics Letters,2012,101(25):253−258

[3]

Fisette B, Chevalier C, Lepine A, et al. Design and fabrication of a scalable high-reliability vacuum sealed package for infrared detectors, Electronic System-Integration Technology Conference, 4th. IEEE, 2012: 1-6

[4]

Chu H M, Sasaki T, Hane K. Design, fabrication, and vacuum package process for high performance of 2D scanning MEMS micromirror, Solid-State Sensors, Actuators and Microsystems Conference, 16th International. IEEE, 2011: 558-561

[5]

Zhang Yunsheng,Feng Fei,Wei Xudong. Vacuum packaging research of optically readable infrared imaging chip[J]. Transducer and Microsystem Technologies,2015,34(2):44−46 (张云胜,冯飞,魏旭东. 光读出红外成像芯片真空封装研究[J]. 传感器与微系统,2015,34(2):44−46(in chinese) doi: 10.13873/J.1000-9787(2015)02-0044-03 Zhang Yunsheng, Feng Fei, Wei Xudong. Vacuum packaging research of optically readable infrared imaging chip[J]. Transducer and Microsystem Technologies, 2015, 34 (2): 44-46 doi: 10.13873/J.1000-9787(2015)02-0044-03

[6]

Bergquist L E,Sasaki Y T. Innovations in helium leak detector systems[J]. J. Vac. Sci. Technol A,1992,10(4):2650−2654 doi: 10.1116/1.577953

[7]

Chen Xu,Huang Tianbin,Wang Ligong,et al. Ultrasensitive leak detection during ultrahigh vacuum evacuation by quadrupole mass spectrometer[J]. J. Vac. Sci. Technol A,2006,24(1):91−94 doi: 10.1116/1.2137330

[8]

Chen Xu,Xiao Libo,Huang Tianbin,et al. Real time calibration for ultrasensitive leak detection[J]. Vacuum,2006,81:257−259 doi: 10.1016/j.vacuum.2005.11.074

[9]

Li Detian,Cheng Yongjun,Feng Yan,et al. Latest progress in calibrations of ultra-high vacuum and extreme high vacuum[J]. Chinese Journal of Vacuum Science and Technology,2009,29(6):641−648 (李得天,成永军,冯炎,等. 超高/极高真空校准研究进展[J]. 真空科学与技术学报,2009,29(6):641−648(in chinese) Li Detian, Cheng Yongjun, Feng Yan, et al. Latest progress in calibrations of ultra-high vacuum and extreme high vacuum[J]. Chinese Journal of Vacuum Science and Technology, 2009, 29 (6): 641-648

[10]

Li Detian,Zhang Dixin,Feng Yan,et al. R&D of vacuum metrologic standards in LIP and their applications[J]. Vacuum,2009,46(6):1−7 (李得天,张涤新,冯炎,等. 真空计量标准的研制与应用[J]. 真空,2009,46(6):1−7(in chinese) Li Detian, Zhang Dixin, Feng Yan, et al. R&D of vacuum metrologic standards in LIP and their applications[J]. Vacuum, 2009, 46 (6): 1-7

[11]

Li Detian,Feng Yan,Cheng Yongjun,et al. Measurement of extremely low gas flow[J]. Chinese Journal of Vacuum Science and Technology,2011,31(4):435−439 (李得天,冯炎,成永军,等. 极小气体流量测量技术研究[J]. 真空科学与技术学报,2011,31(4):435−439(in chinese) doi: 10.3969/j.issn.1672-7126.2011.04.10 Li Detian, Feng Yan, Cheng Yongjun, et al. Measurement of extremely low gas flow[J]. Chinese Journal of Vacuum Science and Technology, 2011, 31 (4): 435-439 doi: 10.3969/j.issn.1672-7126.2011.04.10

[12]

Li Detian,Guo Meiru,Ge Min,et al. Calibration of ultra-low leak rate with constant conductance technique[J]. Chinese Journal of Vacuum Science and Technology,2006,26(5):358−362 (李得天,郭美如,葛敏,等. 固定流导法真空漏孔校准装置[J]. 真空科学与技术学报,2006,26(5):358−362(in chinese) doi: 10.13922/j.cnki.cjovst.2006.05.005 Li Detian, Guo Meiru, Ge Min, et al. Calibration of ultra-low leak rate with constant conductance technique[J]. Chinese Journal of Vacuum Science and Technology, 2006, 26 (5): 358-362 doi: 10.13922/j.cnki.cjovst.2006.05.005

[13]

Li Detian,Feng Yan,Zhao Lan,et al. Design of portable gar micro-flowmeter[J]. Vacuum,2010,47(2):60−63 (李得天,冯炎,赵澜,等. 便携式气体微流量计的设计[J]. 真空,2010,47(2):60−63(in chinese) Li Detian, Feng Yan, Zhao Lan, et al. Design of portable gar micro-flowmeter[J]. Vacuum, 2010, 47 (2): 60-63

[14]

Lu Yaowen,Chen Xu,Li Detian,et al. A novel vacuum leak calibration apparatus with lower limit of 1.3×10⁻¹⁴ Pa·m³/s[J]. Chinese Journal of Vacuum Science and Technology,2014,5(1):21−25 (卢耀文,陈旭,李得天,等. 一种下限为1.3×10⁻¹⁴ Pa·m³/s的真空漏孔校准装置[J]. 真空科学与技术学报,2014,5(1):21−25(in chinese) Lu Yaowen, Chen Xu, Li Detian, et al. A novel vacuum leak calibration apparatus with lower limit of 1.3×10⁻¹⁴ Pa·m³/s[J]. Chinese Journal of Vacuum Science and Technology, 2014, 5 (1): 21-25

[15]

Lu Yaowen,Wu Duan,Chen Chun,et al. Novel standard gas flowmeter covering (10⁻¹-10⁻¹⁰) Pa·m³/s range: an instrumentation study[J]. Chinese Journal of Vacuum Science and Technology,2020,40(7):674−678 (卢耀文,吴端,陈春等. 一种(10⁻¹-10⁻¹⁰) Pa·m³/s标准气体流量计的设计[J]. 真空科学与技术学报,2020,40(7):674−678(in chinese) Lu Yaowen, Wu Duan, Chen Chun, et al. Novel standard gas flowmeter covering (10⁻¹-10⁻¹⁰) Pa·m³/s range: an instrumentation study[J]. Chinese Journal of Vacuum Science and Technology, 2020, 40 (7): 674-678

[16]

Lu Yaowen,Dong Yunning,Yang Chuansen,et al. A novel design of standard gas flowmeter with the range of (10⁻⁵-10⁻¹⁶) Pa·m³/s[J]. Chinese Journal of Vacuum Science and Technology,2021,41(5):422−426 (卢耀文,董云宁,杨传森,等. 一种 (10⁻⁵-10⁻¹⁶) Pa·m³/s标准气体流量计的设计[J]. 真空科学与技术学报,2021,41(5):422−426(in chinese) Lu Yaowen, Dong Yunning, Yang Chuansen, et al. A novel design of standard gas flowmeter with the range of (10⁻⁵-10⁻¹⁶) Pa·m³/s[J]. Chinese Journal of Vacuum Science and Technology, 2021, 41 (5): 422-426

[17]

Lu Yaowen,Li Detian,Qi Jing,et al. Design of Ultrasensitive leak detector with lower detection limit of 5×10⁻¹⁶ Pa·m³/s[J]. Chinese Journal of Vacuum Science and Technology,2019,39(1):1−5 (卢耀文,李得天,齐京,等. 一种下限为5×10⁻¹⁶ Pa·m³/s的高精度超灵敏度检漏装置[J]. 真空科学与技术学报,2019,39(1):1−5(in chinese) Lu Yaowen, Li Detian, Qi Jing, et al. Design of Ultrasensitive leak detector with lower detection limit of 5×10⁻¹⁶ Pa·m³/s[J]. Chinese Journal of Vacuum Science and Technology, 2019, 39 (1): 1-5

[18]

Jousten K,Messer G,Wandrey D. A Precision gas flowmeter for vacuum metrology[J]. Vacuum,1993,44(2):135−141 doi: 10.1016/0042-207X(93)90362-E

[19]

Li Detian,Cheng Yongjun,Feng Yan et al. Very low gas flow measurements for UHV/XHV and leak calibration[J]. Metrologia,2013,50:15−19 doi: 10.1088/0026-1394/50/1/15

[20]

Calcatelli A,Raiteri G,Rumiano G. The IMGC-CNR flowmeter for automatic measurements of low-range gas flows[J]. Measurement,2003,34:121−132 doi: 10.1016/S0263-2241(03)00029-0

[21]

Levinea P D,Sweda J R. Precision gas flowmeter for vacuum calibration[J]. J. Vac. Sci. Technol A,1996,15(3):747−752

[22]

Lu Yaowen,Chen Xu,Li Detian,et al. Novel type of portable vacuum gauge calibration apparatus[J]. Chinese Journal of Vacuum Science and Technology,2013,33(5):462−467 (卢耀文,陈旭,李得天,等. 便携式真空计校准装置[J]. 真空科学与技术学报,2013,33(5):462−467(in chinese) doi: 10.3969/j.issn.1672-7126.2013.05.13 Lu Yaowen, Chen Xu, Li Detian, et al. Novel type of portable vacuum gauge calibration apparatus[J]. Chinese Journal of Vacuum Science and Technology, 2013, 33 (5): 462-467 doi: 10.3969/j.issn.1672-7126.2013.05.13

[23]

Lu Yaowen,Chen Xu,Li Detian,et al. Novel type of portable vacuum leak calibrator apparatus[J]. Chinese Journal of Vacuum Science and Technology,2013,33(12):1179−1183 (卢耀文,陈旭,李得天,等. 便携式真空漏孔校准装置[J]. 真空科学与技术学报,2013,33(12):1179−1183(in chinese) doi: 10.3969/j.issn.1672-7126.2013.12.03 Lu Yaowen, Chen Xu, Li Detian, et al. Novel type of portable vacuum leak calibrator apparatus[J]. Chinese Journal of Vacuum Science and Technology, 2013, 33 (12): 1179-1183 doi: 10.3969/j.issn.1672-7126.2013.12.03

[24]

Lu Yaowen,Chen Xu,Li Detian,et al. A compound and portable vacuum gauge calibration apparatus[J]. Vacuum,2013,50(3):1−5 (卢耀文,陈旭,李得天,等. 复合型便携式真空计校准装置[J]. 真空,2013,50(3):1−5(in chinese) doi: 10.3969/j.issn.1002-0322.2013.03.001 Lu Yaowen, Chen Xu, Li Detian, et al. A compound and portable vacuum gauge calibration apparatus[J]. Vacuum, 2013, 50 (3): 1-5 doi: 10.3969/j.issn.1002-0322.2013.03.001

[25]

倪育才. 实用测量不确定度评定(第2版)[M]. 北京: 中国计量出版社, 2008 Ni Yucai. Shiyong celiang buquedingdu pingding (second edtion)[M]. Beijing: China Metrology Publishing House, 2008