[1] Pearton S, Yang J, Cary IV P H, Ren F, Kim J, Tadjer M J, Mastro M A 2018 Appl. Phys. Express 5 011301
[2] Wang C, Fan W H, Cao R J, et al. 2024 Vacuum 225 113246 doi: 10.1016/j.vacuum.2024.113246
[3] Zhang Y J, Yan J L, Zhao G, Xie W F 2010 Physica B 405 3899 doi: 10.1016/j.physb.2010.06.024
[4] Kudou J, Funasaki S, Takahara M, et al. 2012 Materials Science Forum. Trans Tech Publications Ltd 725 269
[5] Vega E, Isukapati S B, Oder T N 2021 J. Vac. Sci. Technol. A 39 033412 doi: 10.1116/6.0000938
[6] Lee S Y, Kang H C 2018 Jpn. J. Appl. Phys. 57 01AE02 doi: 10.7567/JJAP.57.01AE02
[7] Li L J, Li C K, Wang S Q, Lu Q, Jia Y F, Chen H F 2023 J. Semicond. 44 062805 doi: 10.1088/1674-4926/44/6/062805
[8] 王尘, 张宇超, 范伟航, 李世韦, 张小英, 林海军, 连水养, 朱文章 2022 光学学报 42 0831001 doi: 10.3788/AOS202242.0831001 Wang C, Zhang Y C, Fan W H, Li S W, Zhang X Y, Lin H J, Lien S Y, Zhu W Z 2022 Acta Opt. Sin. 42 0831001 doi: 10.3788/AOS202242.0831001
[9] Dorneles L S, O’Mahony D, Fitzgerald C B, McGee F, Venkatesan M, Stanca I, Lunney J G, Coey J M D 2005 Appl. Surf. Sci. 248 406 doi: 10.1016/j.apsusc.2005.03.044
[10] Schurig P, Couturier M, Becker M, Polity A, Klar P J 2019 Phys. Status Solidi A. 216 1900385 doi: 10.1002/pssa.201900385
[11] Wu J W, Mi W, Yang Z C, Chen Y T, Li P J, Zhao J S, Zhang K L, Zhang X C, Luan C B 2019 Vacuum 167 6 doi: 10.1016/j.vacuum.2019.05.034
[12] Joshi G, Chauhan Y S, Verma A 2021 J. Alloy. Compd. 883 160799 doi: 10.1016/j.jallcom.2021.160799
[13] Wang C, Li S W, Zhang Y C, Fan W H, Lin H J, Wuu D S, Lien S Y, Zhu W Z 2022 Vacuum 202 111176 doi: 10.1016/j.vacuum.2022.111176
[14] Zhao X L, Cui W, Wu Z P, Guo D Y, Li P G, An Y H, Li L H, Tang W H 2017 J. Electronic Mater. 46 2366 doi: 10.1007/s11664-017-5291-5
[15] Spencer J A, Mock A L, Jacobs A G, Schubert M, Zhang Y H, Tadjer M J 2022 Appl. Phys. Rev. 9 011315 doi: 10.1063/5.0078037
[16] Khan A F, Mehmood M, Rana A M, Bhatti M T 2009 Appl. Surf. Sci. 255 8562 doi: 10.1016/j.apsusc.2009.06.020
[17] Ghose S, Rahman S, Hong L, Rojas-Ramirez J S, Jin H, Park K, Klie R, Droopad R 2017 J. Appl. Phys. 122 095302 doi: 10.1063/1.4985855
[18] Qian L X, Liu H Y, Zhang H F, Wu Z H, Zhang W L 2019 Appl. Phys. Lett. 114 113506 doi: 10.1063/1.5088665
[19] Zhang J, Shi J, Qi D C, Chen L, Zhang K H L 2020 APL Mater. 8 020906 doi: 10.1063/1.5142999
[20] Blumenschein N, Kadlec C, Romanyuk O, Paskova T, Muth J F, Kadlec F 2020 J. Appl. Phys. 127 165702 doi: 10.1063/1.5143735
[21] Singh R, Lenka T R, Panda D K, et al. 2020 Mat. Sci. Semicon. Proc. 119 105216 doi: 10.1016/j.mssp.2020.105216
[22] Nie Y Y, Jiao S J, Meng F X, Lu H L, Wang D B, Li L, Gao S Y, Wang J Z, Wang X H 2019 J. Alloy. Compd. 798 568 doi: 10.1016/j.jallcom.2019.05.268
[23] Kuznetsov M V, Safonov A V 2023 Mater. Chem. Phys. 302 127739 doi: 10.1016/j.matchemphys.2023.127739
[24] Jubu P R, Yam F K, Igba V M, Beh K P 2020 J. Solid State Chem. 290 121576 doi: 10.1016/j.jssc.2020.121576
[25] Gutierrez G, Sundin E M, Nalam P G, et al. 2021 J. Phys. Chem. C 125 20468 doi: 10.1021/acs.jpcc.1c04005
[26] Korhonen E, Tuomisto F, Bierwagen O, Speck J S, Galazka Z 2014 Phys. Rev. B 90 245307 doi: 10.1103/PhysRevB.90.245307