[1] 薛函迎, 柴云川, 郭卫斌, 等. 锆钒铁吸气剂常温激活吸氢现象的研究[J]. 真空电子技术,2013,4:48−52 (in Chinese) doi: 10.3969/j.issn.1002-8935.2013.04.010 Xue H Y, Chai Y C, Guo W B, et al. Research on capacity of H2 absorption of ZrVFe getters after activated at room temperature[J]. Vacuum Electronics,2013,4:48−52 doi: 10.3969/j.issn.1002-8935.2013.04.010
[2] 单睿, 齐通通, 黎秉哲, 等. 非蒸散型薄膜吸气剂的研究现状及应用进展[J]. 功能材料,2018,49(5):05049−05055 (in Chinese) Shan R, Qi T T, Li B Z, et al. Research status and application progress of non-evaporable film getter[J]. Journal of Functional Materials,2018,49(5):05049−05055
[3] 庄寿全. 现代吸气剂及其应用技术[J]. 真空电子技术,1994,5:42−49 (in Chinese) Zhuang S Q. Modern getters and their applications[J]. Vacuum Electronics,1994,5:42−49
[4] Benvenuti C, Chiggiato P, Cicoira F, et al. Nonevaporable getter films for ultrahigh vacuum applications[J]. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 1998, 16(1): 148−154
[5] Miyazawa T, Tobishima K, Kato H, et al. Non-evaporable getter (NEG) coating using titanium and palladium vacuum sublimation[J]. Vacuum and Surface Science,2018,61(4):227−235 doi: 10.1380/vss.61.227
[6] 李晓刚, 罗志芳. 非蒸散型吸气剂吸气性能测试方法的研究[J]. 真空,2017,54(2):60−63 (in Chinese) Li X G, Luo Z F. Research on property measurement system of non-evaporable getter[J]. Vacuum,2017,54(2):60−63
[7] Miyazawa T, Kano Y, Nakayama Y, et al. Improved pumping speeds of oxygen-free palladium/titanium nonevaporable getter coatings and suppression of out-gassing by baking under oxygen[J]. Journal of Vacuum Science & Technology A,2019,37(2):021601
[8] Malyshev O B, Middleman K J. Test Particle Monte-Carlo modelling of installations for NEG film pumping properties evaluation[J]. Vacuum,2009,83(6):976−979 doi: 10.1016/j.vacuum.2008.11.008
[9] 颜攀, 韩兴博, 冷海燕, 等. 非蒸散型吸气剂的研究进展[J]. 真空科学与技术学报,2018,38(8):650−656 (in Chinese) Yan P, Han X B, Leng H Y, et al. Latest development of non-evaporable getter materials[J]. Chinese Journal of Vacuum Science and Technology,2018,38(8):650−656
[10] ISO 21360-5, Vacuum technology - Standard methods for measuring vacuum-pump performance - Part5: Non-evaporable getter (NEG) vacuum pumps[S]. 2002
[11] 王蓝陵. 面向密闭空间真空维持的NEG材料性能测试新方法[D]. 合肥: 合肥工业大学, 2023 (in Chinese) Wang L L. New methods for performance testing of NEG materials for vacuum maintenance in confined spaces[D]. Hefei: Hefei University of Technology, 2023
[12] 张亚平, 朱颖峰, 刘湘云, 等. 基于材料放气特性的杜瓦真空失效时间研究[J]. 真空,2016,53(1):46−50 (in Chinese) Zhang Y P, Zhu Y F, Liu X Y, et al. Dewar vacuum failure time based on the material outgassing characteristics[J]. Vacuum,2016,53(1):46−50
[13] Hauer V, Battes K, Flämmich M, et al. Outgassing rate measurements with the difference method in the framework of EMRP IND12[J]. Vacuum,2015,122:250−254 doi: 10.1016/j.vacuum.2015.03.033
[14] Knize R J, Cecchi J L. Theory of bulk gettering[J]. Journal of Applied Physics,1983,54(6):3183−3189
[15] 崔航. ZrV系合金吸气特性和应用研究[D]. 北京: 北京有色金属研究总院, 2015 (in Chinese) Cui H. Investigation on gas absorption characteristic and application of ZrV based alloy[D]. Beijing: General Research Institute for Nonferrous Metals, 2015