[1] Fomenkov I, Brandt D, Ershov A, Schafgans A, Tao Y, Vaschenko G, Rokitski S, Kats M, Vargas M, Purvis M, Rafac R, Fontaine B L, Dea S D, LaForge A, Stewart J, Chang S, Graham M, Riggs D, Taylor T, Abraham M, Brown D 2017 Adv. Opt. Technol. 6 173 doi: 10.1515/aot-2017-0029
[2] Lin N, Chen Y Y, Wei X, Yang W H, Leng Y L 2023 High Power Laser Sci. Eng. 11 e64 doi: 10.1017/hpl.2023.53
[3] Chen Y Y, Liu Z X, Lin N 2025 Opt. Lasers Eng. 189 108946 doi: 10.1016/j.optlaseng.2025.108946
[4] 林楠, 杨文河, 陈韫懿, 魏鑫, 王成, 赵娇玲, 彭宇杰, 冷雨欣 2022 激光与光电子学进展 59 0922002 Lin N, Yang W H, Chen Y Y, Wei X, Wang C, Zhao J L, Peng Y J, Leng Y X 2022 Laser & Optoelectronics Progress 59 0922002
[5] Nowak T S, Yokotsuka T, Fujitaka K, Moriya M, Ohta T, Kurosu A, Sumitani A, Fujimoto J 2010 EUVL Workshop p2
[6] Versolato O O, Sheil J, Witte S, Ubachs W, Hoekstra R 2022 J. Opt. 24 054014 doi: 10.1088/2040-8986/ac5a7e
[7] Sistrunk E, Alessi D, Bayramian A, Chesnut K, Erlandson A, Galvin T, Gibson D, Nguyen H, Reagan B, Schaffers K, Siders C, Spinka T, Haefner C 2019 Proc. SPIE 11034 1103407
[8] Campos D, Harilal S S, Hassanein A 2010 Appl. Phys. Lett. 96 151501 doi: 10.1063/1.3386524
[9] Harilal S S, Sizyuk T, Hassanein A, Campos D, Hough P, Sizyuk V 2011 J. Appl. Phys. 109 063306 doi: 10.1063/1.3562143
[10] Fujioka S, Nishimura H, Nishihara K, Sasaki A, Sunahara A, Okuno T, Ueda N, Ando T, Tao Y, Shimada Y, Hashimoto K, Yamaura M, Shigemori K, Nakai M, Nagai K, Norimatsu T, Nishikawa T, Miyanaga N, Izawa Y, Mima K 2005 Phys. Rev. Lett. 95 235004 doi: 10.1103/PhysRevLett.95.235004
[11] Freeman J R, Harilal S S, Verhoff B, Hassanein A, Rice B 2012 Plasma Sources Sci. Technol. 21 055003 doi: 10.1088/0963-0252/21/5/055003
[12] Ando T, Fujioka S, Nishimura H, Ueda N, Yasuda Y, Nagai K, Norimatsu T, Murakami M, Nishihara K, Miyanaga N, Izawa Y, Mima K, Sunahara A 2006 Appl. Phys. Lett. 89 151501 doi: 10.1063/1.2361260
[13] Harilal S S, O'Shay B, Tillack M S, Tao Y, Paguio R, Nikroo A, Back C A 2006 J. Phys. D: Appl. Phys. 39 484 doi: 10.1088/0022-3727/39/3/010
[14] Hayden P, Cummings A, Murphy N, O’Sullivan G, Sheridan P, White J, Dunne P 2006 J. Appl. Phys. 99 093302 doi: 10.1063/1.2191477
[15] Lan H, Wang X B, Zuo D L 2016 Chin. Phys. B 25 035202 doi: 10.1088/1674-1056/25/3/035202
[16] Si M Q, Wen Z L, Zhang Q J, Dou Y P, Li B C, Song X W, Xie Z, Lin J Q 2023 Acta Physica Sinica 72 065201 doi: 10.7498/aps.72.20222385
[17] Freeman J R, Harilal S S, Hassanein A 2011 J. Appl. Phys. 110 083303 doi: 10.1063/1.3647779
[18] Freeman J R, Harilal S S, Hassanein A, Rice B 2013 Appl. Phys. A 110 853 doi: 10.1007/s00339-012-7164-3
[19] Cummins T, O'Gorman C, Dunne P, Sokell E, O'Sullivan G, Hayden P 2014 Appl. Phys. Lett. 105 044101 doi: 10.1063/1.4891762
[20] Tao Y, Tillack M S, Harilal S S, Sequoia K L, Najmabadi F 2007 J. Appl. Phys. 101 023305 doi: 10.1063/1.2426883
[21] Tao Y, Tillack M S, Harilal S S, Sequoia K L, Burdt R A, Najmabadi F 2007 Opt. Lett. 32 1338 doi: 10.1364/OL.32.001338
[22] Garbanlabaune C, Fabre E, Max C E, Fabbro R, Amiranoff F, Virmont J, Weinfeld M, Michard A 1982 Phys. Rev. Lett. 48 1018 doi: 10.1103/PhysRevLett.48.1018
[23] Wang T Z, Hu Z L, He L, Lin N, Leng Y X, Chen W B 2025 Vacuum 231 113805 doi: 10.1016/j.vacuum.2024.113805
[24] 胡桢麟, 何梁, 王天泽, 林楠, 冷雨欣 2025 中国激光 52 0601001 doi: 10.3788/CJL241283 Hu Z L, He L, Wang T Z, Lin N, Leng Y X 2025 Chin. J. Lasers 52 0601001 doi: 10.3788/CJL241283
[25] 何梁, 胡桢麟, 王天泽, 林楠, 冷雨欣 2025 激光与光电子学进展 62 0314001 doi: 10.3788/LOP242211 He L, Hu Z L, Wang T Z, Lin N, Leng Y X 2025 Laser Optoelectron. Prog. 62 0314001 doi: 10.3788/LOP242211
[26] 蔡懿, 王文涛, 杨明, 刘建胜, 陆培祥, 李儒新, 徐至展 2008 物理学报 57 5100 doi: 10.7498/aps.57.5100 Cai Y, Wang W T, Yang M, Liu J S, Lu P X, Li R X, Xu Z Z 2008 Acta Phys. Sin. 57 5100 doi: 10.7498/aps.57.5100
[27] Versolato O O 2019 Plasma Sources Sci. Technol. 28 083001 doi: 10.1088/1361-6595/ab3302
[28] Morris O, O’Reilly F, Dunne P, Hayden P 2008 Appl. Phys. Lett. 92 231503 doi: 10.1063/1.2945645
[29] Schupp R, Torretti F, Meijer R A, Bayraktar M, Sheil J, Scheers J, Kurilovich D, Bayerle A, Schafgans A A, Purvis M, Eikema K S E, Witte S, Ubachs W, Hoekstra R, Versolato O O 2019 Appl. Phys. Lett. 115 124101 doi: 10.1063/1.5117504
[30] Tao Y, Harilal S S, Tillack M S, Sequoia K L, O'Shay B, Najmabadi F 2006 Opt. Lett. 31 2492 doi: 10.1364/OL.31.002492