[1] Kashiwagi M, Hoshi Y. Electron beam processing system and its application[J]. SEI Technical Review, 2012, 75: 47−53
[2] 张永辉, 江金生, 常安碧, 等. 空心阴极等离子体电子枪研究[J]. 物理学报, 2003(7): 1676−1681 (in Chinese) doi: 10.3321/j.issn:1000-3290.2003.07.023 Zhang Y H, Jiang J S, Chang A B, et al. Study of the hollow cathode plasma electron-gun[J]. Acta Physica Sinica, 2003(7): 1676−1681 doi: 10.3321/j.issn:1000-3290.2003.07.023
[3] 石峰, 王昊. 气体放电等离子体及应用的研究进展[J]. 真空与低温, 2018, 24(2): 80−85 (in Chinese) doi: 10.3969/j.issn.1006-7086.2018.02.002 Shi F, Wang H. Gas discharge plasmas and their application[J]. Vacuum & Cryogenics, 2018, 24(2): 80−85 doi: 10.3969/j.issn.1006-7086.2018.02.002
[4] 许海鹰, 桑兴华, 杨波, 等. 冷阴极气体放电电子束源系统研制[J]. 航空制造技术, 2022, 65(1/2): 98−105 (in Chinese) Xu H Y, Sang X H, Yang B, et al. Research and development of cold cathode gas discharge electron beam source system[J]. Aeronautical Manufacturing Technology, 2022, 65(1/2): 98−105
[5] 许海鹰, 王壮, 彭勇, 等. 丝束同轴冷阴极电子束源研制及其熔丝增材制造适用性研究[J]. 机械工程学报, 2022, 58(7): 276−283 (in Chinese) doi: 10.3901/JME.2022.07.276 Xu H Y, Wang Z, Peng Y, et al. Development of gas discharge electron beam source of electron beam coaxial wire and fuse additive manufacturing applicability[J]. Journal of Mechanical Engineering, 2022, 58(7): 276−283 doi: 10.3901/JME.2022.07.276
[6] Oks E M. Physics and technique of plasma electron sources[J]. Plasma Sources Science and Technology, 1992, 1(4): 249 doi: 10.1088/0963-0252/1/4/004
[7] 丁振峰, 邬钦崇, 任兆杏. 电子回旋共振等离子体技术[J]. 物理, 1996, 25(10): 608−635 (in Chinese) Ding Z F, Wu Q C, Ren Z X. Electron cyclotron resonance plasma technique[J]. Physics, 1996, 25(10): 608−635
[8] Kornilov S Y, Osipov I V, Rempe N G, et al. Generation of narrow focused beams in a plasma-cathode electron gun[J]. Instruments and Experimental Techniques, 2009, 52: 406−411 doi: 10.1134/S002044120903018X
[9] Takao Y, Hiramoto K, Nakagawa Y, et al. Electron extraction mechanisms of a micro-ECR neutralizer[J]. Japanese journal of applied physics, 2016, 55(7S2): 07LD09 doi: 10.7567/JJAP.55.07LD09
[10] 杨捷. 阴极加速下的强流脉冲电子束潘宁放电等离子体的分布规律研[D]. 重庆理工大学, 2024 (in Chinese) Yang J. Research on the distribution law of strong current pulsed electron beam Pannning discharge plasma under cathode acceleration[D]. Chongqing University of Technology, 2024
[11] Hussein M A, Emmert G A. Modeling of plasma flow downstream of an electron cyclotron resonance plasma source[J]. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 1990, 8(3): 2913−2918
[12] Nag B. The boltzmann transport equation and its solution[M]. Electron Transport in Compound Semiconductors. Berlin, Heidelberg: Springer Berlin Heidelberg, 1980: 129−170