WEI Meng, WANG Xiao-Liang, XIAO Hong-Ling, WANG Cui-Mei, PAN Xu, HOU Qi-Feng, WANG Zhan-Guo. 2011: Growth of 2 um Crack-Free GaN on Si(111)Substrates by Metal Organic Chemical Vapor Deposition, Chinese Physics Letters, 28(4): 227-230. doi: 10.1088/0256-307X/28/4/048102
Citation: |
WEI Meng, WANG Xiao-Liang, XIAO Hong-Ling, WANG Cui-Mei, PAN Xu, HOU Qi-Feng, WANG Zhan-Guo. 2011: Growth of 2 um Crack-Free GaN on Si(111)Substrates by Metal Organic Chemical Vapor Deposition, Chinese Physics Letters, 28(4): 227-230. doi: 10.1088/0256-307X/28/4/048102
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Growth of 2 um Crack-Free GaN on Si(111)Substrates by Metal Organic Chemical Vapor Deposition
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Materials Science Center, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083
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Materials Science Center, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083;Key Laboratory of Semiconductor Materials Science, Institute of Semiconductors, Chinese Academy of Sciences,Beijing 100083
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Key Laboratory of Semiconductor Materials Science, Institute of Semiconductors, Chinese Academy of Sciences,Beijing 100083
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Available Online:
30/04/2011
- Fund Project:
the Knowledge Innovation Project of the Chinese Academy of Sciences under Grant Nos YYYJ-0701-02,ISCAS2008T01,ISCAS2009L01 and ISCAS2009L02,the National Natural Science Foundation of China under Grant Nos 60890193 and 60906006,and the National Basic Research Program of China under Grant Nos 2006CB604905 and 2010CB327503
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