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2014 Volume 23 Issue 2

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Wang Hu, Xiong Hui, Wu Zhi-Hao, Yu Chen-Hui, Tian Yu, Dai Jiang-Nan, Fang Yan-Yan. 2014: Occurrence and elimination of in-plane misoriented crystals in AlN epilayers on sapphire via pre-treatment control, Chinese Physics B, 23(2): 524-528. doi: 10.1088/1674-1056/23/2/028101

Citation:

Wang Hu, Xiong Hui, Wu Zhi-Hao, Yu Chen-Hui, Tian Yu, Dai Jiang-Nan, Fang Yan-Yan. 2014: Occurrence and elimination of in-plane misoriented crystals in AlN epilayers on sapphire via pre-treatment control, Chinese Physics B, 23(2): 524-528. doi: 10.1088/1674-1056/23/2/028101

Occurrence and elimination of in-plane misoriented crystals in AlN epilayers on sapphire via pre-treatment control

Wuhan National Laboratory for Optoelectronics, Huazhong University of Science and Technology, Wuhan 430074, China
Wuhan National Laboratory for Optoelectronics, Huazhong University of Science and Technology, Wuhan 430074, China;Jiangsu Key Laboratory of Application Specific Integrated Circuit Design, Nantong University, Nantong 226019, China

Available Online: 30/12/2014
Fund Project: the National Basic Research Program of China(Grant .2010CB923204 and 2012CB619302)%the National Natural Science Foundation of China(Grant .60976042,60906023,61006046,51002058,and 11104150)%the Major Program of the National Natural Science Foundation of China(Grant 10990100)