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2018 Volume 27 Issue 6
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Ning-Ning Wei, Zhen Yang, Hong-Bo Pan, Fan Zhang, Yong-Xing Liu, Rong-Ping Wang, Xiang Shen, Shi-Xun Dai, Qiu-Hua Nie. 2018: Variable angle spectroscopic ellipsometry and its applications in determining optical constants of chalcogenide glasses in infrared, Chinese Physics B, 27(6): 452-458. doi: 10.1088/1674-1056/27/6/067802
Citation: Ning-Ning Wei, Zhen Yang, Hong-Bo Pan, Fan Zhang, Yong-Xing Liu, Rong-Ping Wang, Xiang Shen, Shi-Xun Dai, Qiu-Hua Nie. 2018: Variable angle spectroscopic ellipsometry and its applications in determining optical constants of chalcogenide glasses in infrared, Chinese Physics B, 27(6): 452-458. doi: 10.1088/1674-1056/27/6/067802
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Variable angle spectroscopic ellipsometry and its applications in determining optical constants of chalcogenide glasses in infrared

  • Laboratory of Infrared Material and Devices, Advanced Technology Research Institute, Ningbo University, Ningbo 315211, China;Key Laboratory of Photoelectric Materials and Devices of Zhejiang Province, Ningbo 315211, China

  • Available Online: 01/01/2018
  • Fund Project: the National Natural Science Foundation of China(Grant .61775111 and 61775109)%the International Cooperation Project of Ningbo City,China(Grant 2017D10009)%the Scientific Research Foundation of Graduate School of Ningbo University,China,and the K C Wong Magna Fund in Ningbo University,China
  • The principle of variable angle spectroscopic ellipsometry (VASE) and the data analysis models,as well as the applications of VASE in the characterization of chalcogenide bulk glasses and thin films are reviewed.By going through the literature and summarizing the application scopes of various analysis models,it is found that a combination of various models,rather than any single data analysis model,is ideal to characterize the optical constants of the chalcogenide bulk glasses and thin films over a wider wavelength range.While the reliable optical data in the mid-and far-infrared region are limited,the VASE is flexible and reliable to solve the issues,making it promising to characterize the optical properties of chalcogenide glasses.
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Variable angle spectroscopic ellipsometry and its applications in determining optical constants of chalcogenide glasses in infrared

  • Available Online: 01/01/2018

Abstract: The principle of variable angle spectroscopic ellipsometry (VASE) and the data analysis models,as well as the applications of VASE in the characterization of chalcogenide bulk glasses and thin films are reviewed.By going through the literature and summarizing the application scopes of various analysis models,it is found that a combination of various models,rather than any single data analysis model,is ideal to characterize the optical constants of the chalcogenide bulk glasses and thin films over a wider wavelength range.While the reliable optical data in the mid-and far-infrared region are limited,the VASE is flexible and reliable to solve the issues,making it promising to characterize the optical properties of chalcogenide glasses.

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