Search Advanced
2009 Volume 26 Issue 8
Article Contents
Previous Article Next Article

CHEN Da, ZHANG Yu-Ming, ZHANG Yi-Men, WANG Yue-Hu, TANG Xiao-Yan. 2009: Effect of Carbonized Conditions on Residual Strain and Crystallinity Quality of Heteroepitaxial Growth 3C-SiC Films, Chinese Physics Letters, 26(8): 214-216.
Citation: CHEN Da, ZHANG Yu-Ming, ZHANG Yi-Men, WANG Yue-Hu, TANG Xiao-Yan. 2009: Effect of Carbonized Conditions on Residual Strain and Crystallinity Quality of Heteroepitaxial Growth 3C-SiC Films, Chinese Physics Letters, 26(8): 214-216.
shu

Effect of Carbonized Conditions on Residual Strain and Crystallinity Quality of Heteroepitaxial Growth 3C-SiC Films

  • School of Microelectronics,Xidian University,Xi'an 710071;Key Laboratory of Wide Band-Gap Semiconductor Materials and Devices,Xidian University,Xi'an 710071

  • Available Online: 30/08/2009
  • Fund Project: the National Natural Science Foundation of China under Grant No 60876061,Pre-research Foundation under Grant No 9140A08050508,and Shaannxi 13115 Innovation Engineering under Grant No 2008ZDKG-302
  • 加载中
  • 加载中
通讯作者: 陈斌, bchen63@163.com
  • 1. 

    沈阳化工大学材料科学与工程学院 沈阳 110142

  1. 本站搜索
  2. 百度学术搜索
  3. 万方数据库搜索
  4. CNKI搜索
Export Citation
PDF
XML

Article Metrics

Article views(48) PDF downloads(0) Cited by(0)

Access History

Effect of Carbonized Conditions on Residual Strain and Crystallinity Quality of Heteroepitaxial Growth 3C-SiC Films

  • Available Online: 30/08/2009

Abstract: 

    HTML

Reference (0)

Catalog

    /

    DownLoad:  Full-Size Img  PowerPoint
    Return
    Return