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2008 Volume 25 Issue 10
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WANG Yue, WU Yuan-Da, LI Jian-Guang, WANG Hong-Jie, HU Xiong-Wei. 2008: Realization of MMI Power Splitter by UV-light Imprinting Technique Using Hybrid Sol-Gel SiO2 Materials, Chinese Physics Letters, 25(10): 3693-3695.
Citation: WANG Yue, WU Yuan-Da, LI Jian-Guang, WANG Hong-Jie, HU Xiong-Wei. 2008: Realization of MMI Power Splitter by UV-light Imprinting Technique Using Hybrid Sol-Gel SiO2 Materials, Chinese Physics Letters, 25(10): 3693-3695.
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Realization of MMI Power Splitter by UV-light Imprinting Technique Using Hybrid Sol-Gel SiO2 Materials

  • R&D Center of Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083

  • Available Online: 30/10/2008
  • Fund Project: the National Natural Science Foundation of China under Grant Nos 60507006 and 60707008
  • An efficient fabrication scheme of buried ridge, waveguide devices is demonstrated by UV-light imprinting technique using organic-inorganic hybrid sol-gel Zr-doped SiO2 materials. The refractive indices of a guiding layer and a cladding layer for the buried ridge waveguide structure are 1.537 and 1.492 measured at 1550nm, respectively. The tested results show more circular mode profiles due to existence of the cladding layer. A buried ridge single-mode waveguide operating at 1550nm has a low propagation loss (O.088 dB/cm) and the 1 × 2 MMI power splitter exhibits uniform outputs, with a very low splitting loss of O.029dB at 1549nm.
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通讯作者: 陈斌, bchen63@163.com
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    沈阳化工大学材料科学与工程学院 沈阳 110142

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Realization of MMI Power Splitter by UV-light Imprinting Technique Using Hybrid Sol-Gel SiO2 Materials

  • Available Online: 30/10/2008

Abstract: An efficient fabrication scheme of buried ridge, waveguide devices is demonstrated by UV-light imprinting technique using organic-inorganic hybrid sol-gel Zr-doped SiO2 materials. The refractive indices of a guiding layer and a cladding layer for the buried ridge waveguide structure are 1.537 and 1.492 measured at 1550nm, respectively. The tested results show more circular mode profiles due to existence of the cladding layer. A buried ridge single-mode waveguide operating at 1550nm has a low propagation loss (O.088 dB/cm) and the 1 × 2 MMI power splitter exhibits uniform outputs, with a very low splitting loss of O.029dB at 1549nm.

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