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2002 Volume 19 Issue 12
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吴远大, 邢华, 张乐天, 李爱武, 于永森, 张玉书. 2002: Preparation of a Waveguide Array in Flame Hydrolysis Deposited GeO2-SiO2 Glasses by Excimer Laser Irradiation, Chinese Physics Letters, 19(12): 1877-1879.
Citation: 吴远大, 邢华, 张乐天, 李爱武, 于永森, 张玉书. 2002: Preparation of a Waveguide Array in Flame Hydrolysis Deposited GeO2-SiO2 Glasses by Excimer Laser Irradiation, Chinese Physics Letters, 19(12): 1877-1879.
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Preparation of a Waveguide Array in Flame Hydrolysis Deposited GeO2-SiO2 Glasses by Excimer Laser Irradiation

  • Department of Electronics Engineering, Jilin University, Changchun 130023

  • Available Online: 30/12/2002
  • Fund Project: the National 973 Key Research Foundation of China under Grant No G2000036602
  • SiO2 glass films doped with GeO2 were prepared by the flame hydrolysis deposition method, then annealed at 1200. C. After exposure to high pressure hydrogen, the as-deposited films were irradiated with excimer laser pulses operated at 248nm. The induced refractive index change (the growth of index change was 0.33%) was measured by a spectroscopic ellipsometer. A waveguide array has been written in the film by irradiation through a phase mask.
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    沈阳化工大学材料科学与工程学院 沈阳 110142

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Preparation of a Waveguide Array in Flame Hydrolysis Deposited GeO2-SiO2 Glasses by Excimer Laser Irradiation

  • Available Online: 30/12/2002

Abstract: SiO2 glass films doped with GeO2 were prepared by the flame hydrolysis deposition method, then annealed at 1200. C. After exposure to high pressure hydrogen, the as-deposited films were irradiated with excimer laser pulses operated at 248nm. The induced refractive index change (the growth of index change was 0.33%) was measured by a spectroscopic ellipsometer. A waveguide array has been written in the film by irradiation through a phase mask.

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