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2010 Volume 26 Issue 2
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2010: Design and Characterization of Evanescently Coupled Uni-Traveling Carrier Photodiodes with a Multimode Diluted Waveguide Structure, Chinese Physics Letters, 27(2): 299-302.
Citation: 2010: Design and Characterization of Evanescently Coupled Uni-Traveling Carrier Photodiodes with a Multimode Diluted Waveguide Structure, Chinese Physics Letters, 27(2): 299-302.
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Design and Characterization of Evanescently Coupled Uni-Traveling Carrier Photodiodes with a Multimode Diluted Waveguide Structure

  • Key Laboratory of Semiconductor Materials Science,Institute of Semiconductors,Chinese Academy of Sciences,PO Box 912,Beijing 100083;}

  • A new evanescently coupled uni-traveling carrier photodiode (EC-UTC-PD) is designed, fabricated and characterized, which incorporates a multimode diluted waveguide structure and UTC active waveguide structure together. A high responsivity of 0.68 A/W at 1.55-μm without an anti-reflection coating, a linear photocurrent responsivity of more than 21 mA, and a large -1 dB vertical alignment tolerance of 2.5 μm are achieved.
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通讯作者: 陈斌, bchen63@163.com
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    沈阳化工大学材料科学与工程学院 沈阳 110142

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Design and Characterization of Evanescently Coupled Uni-Traveling Carrier Photodiodes with a Multimode Diluted Waveguide Structure

Abstract: A new evanescently coupled uni-traveling carrier photodiode (EC-UTC-PD) is designed, fabricated and characterized, which incorporates a multimode diluted waveguide structure and UTC active waveguide structure together. A high responsivity of 0.68 A/W at 1.55-μm without an anti-reflection coating, a linear photocurrent responsivity of more than 21 mA, and a large -1 dB vertical alignment tolerance of 2.5 μm are achieved.

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