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强电离放电产生高浓度臭氧的基础理论与方法研究
HIGH CONCENTRATION OZONE PRODUCED BY STRONG IONIZATION DISCHARGE OF DIELECTRIC BARRIER
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摘要: 论述了介质阻挡强电离放电形成方法及其产生臭氧的等离子体反应过程.实现用电场强度、电子能量控制臭氧产生浓度和分解.采用α型Al2O3制成电介质薄层(230μm)以及窄放电间隙(110μm)的新工艺、新技术，取得折合电场强度E/n大于400Td的强电离放电，电子取得平均能量大于10eV，臭氧浓度达到250g/Nm3，臭氧产生效率达到200g/kWh.进而实现了臭氧产生装置生产组合模块化、小型化.Abstract: Ozone generation by strong ionization discharge of the dielectric barriers is described. The ozone concentration and decomposition are controlled by the electric field intensity and electron energy. New technologies with thinner dielectric layers (230μm) of α-Al2O3 and narrow discharge gaps (110μm) are employed to achieve strong ionization discharges with a reduced field(E/n) and electron average energy of more than 400Td and 10eV, respectively. The ozone concentration can reach 250g/Nm3 and the efficiency 200g/Nm3. Ozone generators of high yield and miniaturization with module assemblies can now be realized.
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