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方波调制下自由载流子吸收测量半导体载流子输运参数的时域模型*
Time domain theory of the electronic transp ort prop erty of semiconductors measured by means of square-wave-mo dulated free carrier absorption technique
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摘要: 本文建立了用于测量半导体载流子输运特性(载流子寿命、载流子扩散系数和前表面复合速度)的方波调制下自由载流子吸收(free carrier absorption, FCA)检测技术的时域理论模型。通过数值模拟,分析了在不同调制频率下时域曲线的变化趋势以及各个载流子输运参数对时域曲线的影响。结果表明方波调制下的自由载流子吸收的时域信号对各个参数都用较高的灵敏度,且参数值的测量范围大于频域测量范围。Abstract: A time-domain model for the square-wave-modulated free carrier absorption (MFCA) is developed in measuring the electronic transport properties (the carrier lifetime, the carrier diffusivity, and the front surface recombination velocity) of semiconductor wafers. The dependences of time-domain MFCA signals on the electronic transport properties at different modulation frequencies are investigated by computer simulation. It is found that there are the high sensitivities of MFCA signal to the individual transport parameter. Furthermore, compared with the results by frequency-domain MFCA, in time-domain MFCA measuring ranges the transport properties can be improved.
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