1000线／毫米软X射线自支撑闪耀透射光栅的设计与制作

陈勇; 邱克强; 徐向东; 刘正坤; 刘颖; 付绍军

中国科学技术大学国家同步辐射实验室,合肥,230029

Design and fabrication of 1000 line/mm soft X-ray freestanding blazed transmission gratings

摘要: 基于标量衍射理论讨论了软x射线自支撑闪耀透射光栅的特性并设计了光栅的结构参数．采用全息光刻和湿法腐蚀技术，成功制作了周期1μm、占空比0．1—0．2、高宽比约100、栅线厚度10μm、有效面积比为65％的自支撑闪耀透射光栅．单元尺寸为15minx15mm的硅绝缘体上含有四个5mmX5mm的自支撑闪耀透射光栅窗口．在国家同步辐射实验室检测了该光栅在5—50nm波长范围内的衍射效率．波长扫描测量结果表明，闪耀效应明显地发生在类似镜面的光栅侧壁镜面反射方向上，闪耀级次位置及其特征与标量理论预测的一致．衍射效率的实测结果基本与理论模拟符合，只是因光栅结构上的缺陷致使衍射效率偏低，峰值只有理论值的38％-49％．实验结果证明了闪耀透射光栅的概念和湿法制作工艺的可行性．

关键词:

Abstract: The performance prediction of freestanding blazed transmission grating is discussed using scalar diffraction theory, and grating design parameters are accodingly given. A freestanding transmission grating with a period of 1 lxm, duty cycle of 0.1-0.2, aspect ratio of about 100, thickness of 10 μm and fractional area of 65% is successfully fabricated by holographic lithography and anisotropic wet etching. The size of a single die is 15 mmx 15 mm divided into four 5 mmx 5 mm windows. The diffraction efficiency of the fabricated grating is tested at the National Synchrotron Radiation Laboratory in a wavelength region of 5-50 nm. The wavelength scanning results show a strong blazing effect in the direction of specular reflection from mirror-like grating sidewalls, as expected. The measured and normalized diffraction efficiency is consistent with the theoretical prediction within 38%-49% due to grating structural imperfections. These experimental results prove not only the concept of blazed transmission grating but also practicability of the fabrication process.

1000线／毫米软X射线自支撑闪耀透射光栅的设计与制作

中国科学技术大学国家同步辐射实验室,合肥,230029

关键词:

Design and fabrication of 1000 line/mm soft X-ray freestanding blazed transmission gratings

中国科学技术大学国家同步辐射实验室,合肥,230029

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