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射频功率对辉光聚合物薄膜结构与光学性质的影响
Influence of radio frequency power on the structure and optical properties of glow discharge polymer films
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摘要: 采用三倍频射频辉光放电聚合技术，利用低压等离子聚合装置在不同功率条件下制备辉光放电聚合物（GDP）薄膜．利用表面轮廓仪、Fourier变换红外光谱仪表征所制备薄膜在不同功率下的生长速率和化学结构，讨论了功率变化对薄膜生长速度和化学结构的影响．利用元素分析仪和紫外可见光谱仪表征GDP薄膜中碳氢原子比和光学性质．研究表明：薄膜的生长速率随射频功率的增大先增加后减少，功率为40w时，生长速率可达到0．34pμm／h．在波长大于500nm的可见光区，GDP薄膜的光学透过率都在90％以上．GDP薄膜的光学问隙随射频功率的增大先减少后增加，射频功率为50w时制备GDP薄膜的光学间隙最小．
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关键词:
- 辉光放电聚合物 /
- 沉积速率 /
- Fourier红外吸收 /
- 光学性质
Abstract: Taking advantage of triple radio frequency, hydrocarbon polymer films are fabricated at different powers by the glow discharge polymerization technology. The deposition rates, the chemical structures, the atomic ratios and the optical properties are studied. The thicknesses of glow discharge polymer （GDP） films are measured by the surface profiler technology. The chemical compositions of GDP films are characterized by FT-IR spectra and element analysis. The optical properties of GDP films are investigated by UV-VIS spectra. With RF power increasing from 20 W to 60 W, the deposition rate of GDP films first increases 0.34μm/h, then decreases after the RF power reaches 40 W. In visible light area more than 500 nm, the optical transmittances of all GDP films are more than 90%.The optical band gaps of GDP films first decrease, then reaches the minimum at the RF power of 50 W, then increases when the RF power increases from 20 W to 60 W. -
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