[1] Giorgi T A, Ferrario B, Storey B. An updated review of getters and gettering[J]. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films,1985,3(2):417−423
[2] Santucci A, Farina L, Tosti S, et al. Novel non-evaporable getter materials and their possible use in fusion application for tritium recovery[J]. Molecules,2020,25(23):5675 doi: 10.3390/molecules25235675
[3] Porcelli T, Puro M, Raimondi S, et al. NEG coating deposition and characterisation of narrow-gap insertion devices and small-diameter chambers for light sources and particle accelerators[J]. Vacuum,2017,138:157−164 doi: 10.1016/j.vacuum.2016.12.036
[4] Benvenuti C, Chiggiato P, Pinto P C, et al. Vacuum properties of TiZrV non-evaporable getter films[J]. Vacuum,2001,60(1-2):57−65 doi: 10.1016/S0042-207X(00)00246-3
[5] Diekmann L F, Kassner A, Dencker F, et al. Nonevaporable getter-MEMS for generating UHV conditions in small volumina[J]. Journal of Vacuum Science & Technology B,2022,40(5):054202
[6] Bourim E M, Kim H Y, Chung N K. Development and characterization of non-evaporable getter thin films with Ru seeding layer for MEMS applications[J]. Micromachines,2018,9(10):490 doi: 10.3390/mi9100490
[7] 宋伊, 冯焱, 成永军, 等. 非蒸散型吸气材料研究现状及进展[J]. 中国有色金属学报,2021,31(8):2160−2170(in Chinese) Song Y, Feng Y, Cheng Y J, et al. Research status and progress of non-evaporable getter for electronic vacuum devices[J]. The Chinese Journal of Nonferrous Metals,2021,31(8):2160−2170
[8] Sharma R K, Sinha A K, Basak D C, et al. Surface studies and measurement of pumping characteristic of NEG coating (Ti-V-Zr)[C]//2014 International Symposium on Discharges and Electrical Insulation in Vacuum (ISDEIV). IEEE, 2014: 529−532
[9] 严达利. 多孔硅基金属氧化物纳米复合材料的制备与气敏性能研究[D]. 天津大学, 2014(in Chinese) Yan D L. Preparation and gas sensing properties research of porous silicon based metal oxide nanocomposites[D]. Tianjin University, 2014
[10] 中华人民共和国国家质量监督检验检疫总局. GB/T 25497−2010 吸气剂气体吸放性能测试方法[S]. 北京: 中国标准出版社, 2011
[11] Cao Q, Wang X Y, Wang S H, et al. Development and characterization of an improved Ti-Zr-V thin-film getter with 3D porous nano-scaffolds[J]. Vacuum,2023,209:111747 doi: 10.1016/j.vacuum.2022.111747
[12] Cao Q, Li Y L, Wang X Y, et al. Study of nano-scaffold on improving gettering performance of Ti-Zr-V film and the influencing mechanism[J]. Materials Today Communications,2024,39:108923 doi: 10.1016/j.mtcomm.2024.108923
[13] Carstensen J, Christophersen M, Föll H. Pore formation mechanisms for the Si-HF system[J]. Materials Science and Engineering: B,2000,69:23−28
[14] 卢乐. P型多孔硅制备、成核机理及其光电性能调控研究[D]. 江苏大学, 2019(in Chinese) Lu L. Preparation, nucleation mechanism and photoelectric properties control of P-type porous silicon[D]. Jiangsu University, 2019
[15] Mahalik N P. Micromanufacturing and nanotechnology[M]. Berlin: Springer, 2006, 15: 357−381
[16] Thornton J A. High rate thick film growth[J]. Annual Review of Materials Science,1977,7:239−260 doi: 10.1146/annurev.ms.07.080177.001323
[17] Alvarez R, Garcia-Martin J M, Lopez-Santos M C, et al. On the deposition rates of magnetron sputtered thin films at oblique angles[J]. Plasma Processes and Polymers,2014,11(6):571−576 doi: 10.1002/ppap.201300201
[18] 徐媛媛. 磁控溅射亚稳态Cr-C涂层的结构演变和多功能性研究[D]. 中国科学院大学, 2022(in Chinese) Xu Y Y. Structural evolution and multifunctionality of metastable Cr-C coatings prepared by magnetron sputtering[D]. University of Chinese Academy of Sciences, 2022
[19] Šutara F, Tsud N, Veltruská K, et al. XPS and ESD study of carbon and oxygen chemistry on TiZrV NEG[J]. Vacuum,2001,61(2−4):135−139 doi: 10.1016/S0042-207X(00)00469-3
[20] Das B K, Das R, Verma R, et al. Improvement of deuterium emission by St 172 NEG pump in a sealed off vacuum device[J]. Vacuum,2020,181:109743 doi: 10.1016/j.vacuum.2020.109743
[21] Yoshida H. Testing of non-evaporable getter pills for standardization of their pumping performance testing method[J]. Vacuum,2022,197:110797 doi: 10.1016/j.vacuum.2021.110797