非蒸散型吸气剂泵（NEG）对N<sub>2</sub>气的抽气特性研究

陈千睿; 魏萌萌; 卢耀文; 杨传森; 丁双; 闫睿; 杨振; 康朋伟; 陈又琦

doi:10.13922/j.cnki.cjvst.202212010

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