[1] Song P,Ma Z,Ma J,et al. Recent progress of miniature MEMS pressure sensors[J]. Micromachines,2020,11(1):56 doi: 10.3390/mi11010056
[2] Hyland R W,Shaffer R L. Recommended practices for the calibration and use of capacitance diaphragm gages as transfer standards[J]. Journal of Vacuum Science & Technology A:Vacuum, Surfaces, and Films,1991,9(6):2843−2863
[3] Feldman J,Paul M,Xu G,et al. Effects of natural zeolites on field-scale geologic noble gas transport[J]. Journal of Environmental Radioactivity,2020,220:106279
[4] Jousten K,Naef S. On the stability of capacitance-diaphragm gauges with ceramic membranes[J]. Journal of Vacuum Science & Technology A:Vacuum, Surfaces, and Films,2011,29(1):011011
[5] Patra J C,Panda G,Baliarsingh R. Artificial neural network-based nonlinearity estimation of pressure sensors[J]. IEEE Transactions on Instrumentation and Measurement,1994,43(6):874−881 doi: 10.1109/19.368082
[6] Sullivan J J. Development of variable capacitance pressure transducers for vacuum applications[J]. Journal of Vacuum Science & Technology A:Vacuum, Surfaces, and Films,1985,3(3):1721−1730
[7] Nishizawa S I,Hirata M. DSMC analysis of thermal transpiration of capacitance diaphragm gauge[J]. Vacuum,2002,67(3-4):301−306 doi: 10.1016/S0042-207X(02)00212-9
[8] Daudé B,Elandaloussi H,Janssen C. On the gas dependence of thermal transpiration and a critical appraisal of correction methods for capacitive diaphragm gauges[J]. Vacuum,2014,104:77−87 doi: 10.1016/j.vacuum.2014.01.002
[9] Setina J. New approach to corrections for thermal transpiration effects in capacitance diaphragm gauges[J]. Metrologia,1999,36(6):623 doi: 10.1088/0026-1394/36/6/27
[10] Scherschligt J,Barker D,Eckel S,et al. Stability of bakeable capacitance diaphragm gauges[J]. Vacuum,2022,197:110801 doi: 10.1016/j.vacuum.2021.110801
[11] Amidror I. Scattered data interpolation methods for electronic imaging systems: a survey[J]. Journal of electronic imaging,2002,11(2):157−176 doi: 10.1117/1.1455013