微波氢等离子体反应特性研究

卢应瀚; 李言钦

doi:10.13922/j.cnki.cjvst.202212009

[1]

Sabat K C,Rajput P,Paramguru R K,et al. Reduction of oxide minerals by hydrogen plasma: an overview[J]. Plasma Chemistry & Plasma Processing,2014,34(1):1−23

[2]

Sabat K C. Physics and chemistry of solid state direct reduction of iron ore by hydrogen plasma[J]. Фізика і хімія твердого тіла,2021,22(2):292−300

[3]

贺新福. 甲烷低温等离子体活化与煤热解耦合过程研究[D]. 大连: 大连理工大学, 2012 He X F. Integrated Process of Coal Pyrolysis with Methane Activation by Cold Plasma[D]. Dalian: Dalian University of Technology, 2012

[4]

Guan Y X. Microwave Plasma Technology and Research Progress[J]. Safety Health & Environment,2020,20(2):1−5 (关银霞. 微波等离子体技术及研究进展[J]. 安全, 健康和环境,2020,20(2):1−5(in chinese) Guan Y X. Microwave Plasma Technology and Research Progress[J]. Safety Health & Environment, 2020, 20(2): 1-5(

[5]

Hrebtov M Y,Bobrov M S. Numerical optimization of hydrogen microwave plasma reactor for diamond film deposition[J]. Journal of Physics:Conference Series,2019,1382:012010 doi: 10.1088/1742-6596/1382/1/012010

[6]

Wang F Y,Meng X M,Tang W Z,et al. Simulation of Hydrogen and Argon Microwave Plasma in a Cylindrical Microwave Plasma Chemical Vapor Deposition Reactor[J]. Vacuum and Cryogenics,2008(03):157−163 (王凤英,孟宪明,唐伟忠,等. 圆柱谐振腔式MPCVD装置中氢、氩微波等离子体分布规律的数值模拟[J]. 真空与低温,2008(03):157−163(in chinese) Wang F Y, Meng X M, Tang W Z, et al. Simulation of Hydrogen and Argon Microwave Plasma in a Cylindrical Microwave Plasma Chemical Vapor Deposition Reactor[J]. Vacuum and Cryogenics, 2008(03): 157-163(

[7]

谷昊周. 微波等离子体化学气相沉积谐振腔的数值仿真与研究[D]. 杭州: 杭州电子科技大学, 2022 Gu H Z.Numerical simulation and stuy of resonant cavities for microwave plasma chemical vapour deposition[D]. Hangzhou: Hangzhou Dianzi University, 2022

[8]

Zhu H F,Wang Y K,Ding W M,et al. Preparation of diamond films by low power MPCVD[J]. Diamond & Abrasives Engineering,2021,41(02):39−45 (朱海丰,王艳坤,丁文明等. 低功率MPCVD制备金刚石薄膜[J]. 金刚石与磨料磨具工程,2021,41(02):39−45(in chinese) doi: 10.13394/j.cnki.jgszz.2021.2.0007 Zhu H F, Wang Y K, Ding W M, et al. Preparation of diamond films by low power MPCVD[J]. Diamond & Abrasives Engineering, 2021, 41(02): 39-45 doi: 10.13394/j.cnki.jgszz.2021.2.0007

[9]

Wang B,Wang J H,Weng J,et al. Effect of Gas Flow Mode on Uniformity of MPCVD Diamond Films[J]. Vacuum and Cryogenics,2020,26(02):108−113 (王斌,汪建华,翁俊等. 气体流动方式对MPCVD金刚石薄膜均匀性的影响[J]. 真空与低温,2020,26(02):108−113(in chinese) doi: 10.3969/j.issn.1006-7086.2020.02.004 Wang B, Wang J H, Weng J, et al. Effect of Gas Flow Mode on Uniformity of MPCVD Diamond Films[J]. Vacuum and Cryogenics, 2020, 26(02): 108-113( doi: 10.3969/j.issn.1006-7086.2020.02.004

[10]

Hao J M,Zhu J,Chen Y N,et al. Reduction of Fe₂O₃ by Atmospheric Pressure Cold Plasma Jet[J]. Surface Technology,2017,46(03):151−156 (郝建民,朱军,陈永楠,等. 常压低温冷等离子体还原Fe₂O₃的研究[J]. 表面技术,2017,46(03):151−156(in chinese) Hao J M, Zhu J, Chen Y N, et al.Reduction of Fe₂O₃ by Atmospheric Pressure Cold Plasma Jet[J]. Surface Technology, 2017, 46(03):151-1556(

[11]

Zhang Y W,Ding W Z,Guo S Q,et al. Reduction of Metal Oxide by Non-equlibrium Hydrogen Plasma[J]. Shanghai Metals,2004(04):17−20 (张玉文,丁伟中,郭曙强,等. 非平衡等离子态氢还原金属氧化物的实验[J]. 上海金属,2004(04):17−20(in chinese) doi: 10.3969/j.issn.1001-7208.2004.04.005 Zhang Y W, Ding W Z, Guo S Q, et al. Reduction of Metal Oxide by Non-equlibrium Hydrogen Plasma[J]. Shanghai Metals, 2004(04): 17-20( doi: 10.3969/j.issn.1001-7208.2004.04.005

[12]

郭曙强, 丁伟中, 张玉文. 氧化铁球团在低温氢等离子体中的还原[C]//2002全国冶金物理化学学术会议, 中国金属学会, 2002: 504-507 Guo S Q, Ding W Z, Zhang Y W. Reduction of Fe₂O₃ Pellet in Non-equlibrium Hydrogen Plasma[C]//2002 National Symposium on Metallurgical Physics and Chemistry, CSM, 2002:504-507

[13]

Sabat K C,Murphy A B. Hydrogen plasma processing of iron ore[J]. Metallurgical & Materials Transactions B,2017,48(3):1561−1594

[14]

Rajput P,Sabat K C,Paramguru R K,et al. Direct reduction of iron in low temperature hydrogen plasma[J]. Ironmaking & Steelmaking,2014,40(10):61−68

[15]

Xu M,Zhang W B. Research on Process of Reduction of Ilmenite by Microwave Plasma[J]. Vacuum and Cryogenics,2011,17(04):209−212+223 (徐慢,张文波. 微波等离子体还原钛铁矿工艺研究[J]. 真空与低温,2011,17(04):209−212+223(in chinese) doi: 10.3969/j.issn.1006-7086.2011.04.005 Xu M, Zhang W B. Research on Process of Reduction of Ilmenite by Microwave Plasma[J]. Vacuum and Cryogenics, 2011, 17(04): 209-212+223( doi: 10.3969/j.issn.1006-7086.2011.04.005

[16]

Wei B,Guo H X,Ding S S,et al. Design an Simulation of Microwave Plasma Reactor[J]. Safety & EMC,2020(04):87−92 (卫博,郭海霞,丁叁叁等. 微波等离子体反应器的设计与仿真[J]. 安全与电磁兼容,2020(04):87−92(in chinese) Wei B, Guo H X, Ding S S, et al. Design an Simulation of Microwave Plasma Reactor[J]. Safety & EMC, 2020(04): 87-92(

[17]

Mankelevich Y A,Ashfold M,Ma J. Plasma-chemical processes in microwave plasma-enhanced chemical vapor deposition reactors operating with C/H/Ar gas mixtures[J]. Journal of Applied Physics,2008,104(11):473

[18]

Rajput P,Bhoi B,Sahoo S,et al. Preliminary investigation into direct reduction of iron in low temperature hydrogen plasma[J]. Ironmaking & Steelmaking,2013,40(1):61−68

[19]

Janev R K, Langer W D, Evans K, et al. Elementary processes in hydrogen-helium plasmas: Cross sections and reaction rate coefficients[M]. Elementary Processes in Hydrogen-Helium Plasmas, 1987.

[20]

Kimura T,Kasugai H. Properties of inductively coupled radio frequency CH₄/H₂ Plasmas: experiments and global model[J]. Japanese Journal of Applied Physics,2012,51(4):6202

[21]

Hassouni K,Grotjohn T A. Self-consistent microwave field and plasma discharge simulations for a moderate pressure hydrogen discharge reactor[J]. Journal of Applied Physics,1999,86(1):134−151 doi: 10.1063/1.370710

[22]

李唤. 微波等离子体及其功能薄膜沉积[D]. 合肥: 中国科学技术大学, 2017 Li H. Microwave Plasma and Deposition of Functional Films[D]. Hefei: University of Science and Technology of China, 2017

[23]

Bouherine K,Tibouche A,Ikhlef N,et al. 3-D numerical characterization of a microwave argon PECVD plasma reactor at low pressure[J]. IEEE Transactions on Plasma Science,2016,44:3409−3416 doi: 10.1109/TPS.2016.2619696

[24]

王超. 甲烷针—板放电等离子体的数值模拟及特性研究[D]. 济南: 山东师范大学, 2018 Wang C. Numerical simulation and characterization of methane needle-plate discharge plasma[D]. Jinan: Shandong Normal University, 2018

[25]

Hassouni K,Gicquel A,Capitelli M,et al. Chemical kinetics and energy transfer in moderate pressure H₂ plasmas used in diamond MPACVD processes[J]. Plasma Sources Science and Technology,1999,8(3):494 doi: 10.1088/0963-0252/8/3/320

[26]

Shen Q,Huang R,Xu Z,et al. Numerical 3D modeling: microwave plasma torch at intermediate pressure[J]. Applied Sciences,2020,10(15):5393 doi: 10.3390/app10155393

[27]

张晓友, 戚东升, 何锋, 等. 等离子体对电磁波的阻挡作用研究[C]//中国物理学会第十三届静电学术年会, 中国物理学会, 2006: 193-196 Zhang X Y, Qi D S, He F, et al. Study on Block of Electromagnetic Wave by Plasma[C]//The 13th Annual Electrostatic Conference of the Chinese Physical Society, CPS, 2006: 193-196

[28]

Su X B,Wu Q C,Wan Y X. The Effect of Pressure on the Argon Plasma Characterization[J]. Vacuum and Cryogenics,1997,3(4):3−7 (苏小保,邬钦崇,万元熙. 气压对氩等离子体特性的影响[J]. 真空与低温,1997,3(4):3−7(in chinese) Su X B, Wu Q C, Wan Y X. The Effect of Pressure on the Argon Plasma Characterization[J]. Vacuum and Cryogenics, 1997, 3(4): 3-7(