[1] Song P S, Ma Z, Ma J, et al. Recent progress of miniature MEMS pressure sensors[J]. Micromachines,2020,11(1):56 doi: 10.3390/mi11010056
[2] Feldman J, Paul M, Xu G P, et al. Effects of natural zeolites on field-scale geologic noble gas transport[J]. Journal of Environmental Radioactivity,2020,220-221:106279 doi: 10.1016/j.jenvrad.2020.106279
[3] Hyland R W, Shaffer R L. Recommended practices for the calibration and use of capacitance diaphragm gages as transfer standards[J]. Journal of Vacuum Science & Technology A,1991,9(6):2843−2863
[4] 王凡, 崔宏敏, 宗义仲, 等. 电容式薄膜真空压力传感器设计[J]. 传感器与维系统,2017,36(3):84−86,90(in chinese) Wang F, Cui H M, Zong Y Z, et al. Design of capacitive thin film vacuum pressure sensor[J]. Transducer and Microsystem Technologies,2017,36(3):84−86,90
[5] Shahiri Tabarestani M, Azizollah Ganji B. Analytical analysis of capacitive pressure sensor with clamped diaphragm[J]. IJE Transactions C:Aspects,2013,26(3):297−302
[6] 冉欣, 冯焱, 成永军, 等. 电容薄膜真空计测量误差修正方法研究[J]. 真空与低温,2022,28(4):445−452 (in chinese) doi: 10.3969/j.issn.1006-7086.2022.04.010 Ran X, Feng Y, Cheng Y J, et al. Study on correction method of measurement error of capacitive diaphragm gauge[J]. Vacuum and Cryogenics,2022,28(4):445−452 doi: 10.3969/j.issn.1006-7086.2022.04.010
[7] 吕时良, 李得天, 张涤新, 等. 金属膨胀式真空计量标准[J]. 真空科学与技术,1998,18(4):266−271(in chinese) Lü S L, Li D T, Zhang D X, et al. A static expansion vacuum standard[J]. Vacuum Science and Technology China,1998,18(4):266−271
[8] 贺刚, 蔡晓华, 白阳, 等. 基于模糊PID的犊牛代乳粉奶液温度控制系统设计与试验[J]. 农业机械学报,2022,53(3):266−276(in chinese) doi: 10.6041/j.issn.1000-1298.2022.03.028 He G, Cai X H, Bai Y, et al. Design and test of temperature control system of calf milk replacer solution based on fuzzy PID[J]. Transactions of the Chinese Society for Agricultural Machinery,2022,53(3):266−276 doi: 10.6041/j.issn.1000-1298.2022.03.028
[9] Tanaka K, Ikeda T, Wang H O. Fuzzy regulators and fuzzy observers: relaxed stability conditions and LMI-based designs[J]. IEEE Transactions on Fuzzy Systems,1998,6(2):250−265 doi: 10.1109/91.669023
[10] Wang L X, Mendel J M. Generating fuzzy rules by learning from examples[J]. IEEE Transactions on Systems, Man, and Cybernetics,1992,22(6):1414−1427 doi: 10.1109/21.199466
[11] Feng G. A survey on analysis and design of model-based fuzzy control systems[J]. IEEE Transactions on Fuzzy Systems,2006,14(5):676−697 doi: 10.1109/TFUZZ.2006.883415
[12] Fnaiech M A, Betin F, Capolino G A, et al. Fuzzy logic and sliding-mode controls applied to six-phase induction machine with open phases[J]. IEEE Transactions on Industrial Electronics,2010,57(1):354−364 doi: 10.1109/TIE.2009.2034285
[13] Hayashi K, Otsubo A, Murakami S, et al. Realization of nonlinear and linear PID controls using simplified indirect fuzzy inference method[J]. Fuzzy Sets and Systems,1999,105(3):409−414 doi: 10.1016/S0165-0114(97)00248-0