[1] 王强. 静电梳齿驱动MEMS扫描镜研究[D]. 中国科学院大学(中国科学院光电技术研究所), 2021 (in Chinese) Wang Q. Study on MEMS scanner based on electrostatic comb drive actuator[D]. University of Chinese Academy of Sciences (Institute of Optoelectronic Technology, Chinese Academy of Sciences), 2021
[2] Chen S, Zhang Y, Hong X, et al. Technologies and applications of silicon-based micro-optical electromechanical systems: A brief review[J]. Journal of Semiconductors,2022,43(8):081301 doi: 10.1088/1674-4926/43/8/081301
[3] 杜林云, 许高斌, 花翔, 等. 用于激光雷达的双层梳齿驱动MEMS扫描镜[J]. 电子测量与仪器学报,2021,35(5):8−15 (in Chinese) Du L Y, XU G B, HUA X, et al. MEMS scanning mirror driven by double comb teeth for lidar[J]. Journal of Electronic Measurement and Instrument,2021,35(5):8−15
[4] Chen C D, Lee Y H, Yeh C S. Design and vibration analysis of a piezoelectric-actuated MEMS scanning mirror and its application to laser projection[J]. Smart Materials and Structures,2014,23(12):125007 doi: 10.1088/0964-1726/23/12/125007
[5] Wang D, Watkins C, Xie H. MEMS Mirrors for LiDAR: A review[J]. Micromachines (Basel),2020,11(5):456 doi: 10.3390/mi11050456
[6] Liu Y, Xu J, Zhong S, et al. Variable optical attenuator based on a vertical comb drive actuated MEMS micromirror[J]. Optik,2013,124(20):4100−4103 doi: 10.1016/j.ijleo.2012.12.033
[7] Pengwang E, Rabenorosoa K, Rakotondrabe M, et al. Scanning micromirror platform based on MEMS technology for medical application[J]. Micromachines (Basel),2016,7(2):24 doi: 10.3390/mi7020024
[8] 乔大勇, 苑伟政, 任勇. MEMS激光雷达综述[J/OL]. 微电子学与计算机, 2023(01): 41−49 (in Chinese) Qiao D Y, Yuan W Z, Ren Y. Review of MEMS lidar [J/OL]. Microelectronics & Computer, 2023(01): 41−49
[9] Chen L, Gu W. Improvement and optimization of electromagnetic integrated scanning micromirror[J]. Micromachines (Basel),2021,12(10):1213 doi: 10.3390/mi12101213
[10] 何嘉辉, 周鹏, 余晖俊, 等. 电磁驱动大尺寸MEMS扫描镜的研究[J]. 光子学报,2017,46(1):21−28 (in Chinese) He J H, Zhou P, Yu H J, et al. Research on large size MEMS scanning mirror driven by electromagnetic[J]. Acta Photonica Sinica,2017,46(1):21−28
[11] Lei H, Wen Q, Yu F, et al. AlN film based piezoelectric large-aperture MEMS scanning micromirror integrated with angle sensors[J]. Journal of Micromechanics and Microengineering,2018,28(11):115012 doi: 10.1088/1361-6439/aae051
[12] Dinesh Ram G, Praveen Kumar S, Srinivasan T K, et al. Analysis of piezoelectric based MEMS micromirror for optical communication [C]. 2022 3rd International Conference on Smart Electronics and Communication (ICOSEC). 2022: 1-4
[13] Tang Y, Li J, Xu L, et al. Review of electrothermal micromirrors[J]. Micromachines,2022,13(3):429 doi: 10.3390/mi13030429
[14] 保慧琴, 卫霞, 李茹. V型MEMS电热执行器技术研究[J]. 电子测量技术,2021,44(3):45−49 (in Chinese) Bao H Q, Wei X, Li R. Research on V-beam MEMS electro-thermal actuator technology[J]. Electronic Measurement Technology,2021,44(3):45−49
[15] Frangi A, Guerrieri A, Boni N, et al. Mode coupling and parametric resonance in electrostatically actuated micromirrors[J]. IEEE Transactions on Industrial Electronics,2018,65(7):5962−5969 doi: 10.1109/TIE.2017.2774729
[16] Sadhukhan D, Singh G P. Study of electrostatic actuated MEMS biaxial scanning micro-mirror with comb structure [C]. International Conference on Multifunctional Materials (Icmm-2019). 2020, 2269(1)
[17] 刘耀波, 苑伟政, 乔大勇, 等. 一种新型静电驱动二维微型扫描镜的设计及模态[J]. 光学学报,2013,33(6):299−304 (in Chinese) Liu Y B, Yuan W Z, Qiao D Y, et al. Design and modes of a novel two-dimensional microscanner with electrostatic actuation[J]. Acta Optica Sinica,2013,33(6):299−304
[18] Moon S, Lee J, Yun J, et al. Two-Axis electrostatic gimbaled mirror scanner with self-aligned tilted stationary combs[J]. IEEE Photonics Technology Letters,2016,28(5):557−560 doi: 10.1109/LPT.2015.2513483
[19] 单亚蒙, 任丽江, 沈文江. 应用于激光雷达的二维静电微镜设计[J]. 传感器与微系统,2021,40(2):65−68+72 (in Chinese) Shan Y M, Ren L J, Shen W J. Study on 2D electrostatic-driven micro scanning mirror applied to LiDAR[J]. Sensor and Microsystem,2021,40(2):65−68+72
[20] Farrugia R, Portelli B, Grech I, et al. Design and fabrication of high performance resonant micro-mirrors using the standard SOIMUMPs process[C]. 2020 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP), Lyon, France, 2020: 1−6
[21] 张晓磊, 徐永青, 杜妙璇. 光MEMS芯片驱动结构自对准技术[J]. 微纳电子技术,2018,55(5):366−370 (in Chinese) Zhang X L, Xu Y Q, Du M X. Self-aligned technique for the driving structure of optical MEMS chips[J]. Micro and Nano Electronics Technology,2018,55(5):366−370
[22] Urey H, Kan C, Davis W O. Vibration mode frequency formulae for micromechanical scanners[J]. Journal of Micromechanics and Microengineering,2005,15(9):1713−1721 doi: 10.1088/0960-1317/15/9/013
[23] 付罗均, 彭岚, 吴龙. 谐响应分析在设备减振中的应用[J]. 中国特种设备安全,2022,38(6):20−25 (in Chinese) Fu L J, Peng L, Wu L. Application of harmonic response analysis in equipment vibration reduction[J]. China Special Equipment Safety,2022,38(6):20−25
[24] Qiao D, Zhao R, Zhang Y, et al. An exploration for the degradation behavior of 2-D electrostatic microscanners by accelerated lifetime test[J]. Microelectronics Reliability,2018,80:284−293 doi: 10.1016/j.microrel.2017.07.062
[25] Aunion Tech Co., Ltd. A5M24.2-2400AL [DB/OL]. 2023.12. https:/www.auniontech.com/details-793.html