[1] 张一卓. 新型MPCVD金刚石膜沉积装置模拟及实验研究[D]. 太原理工大学, 2022 (in Chinese) Zhang Y Z. Simulation and experimental study of new MPCVD diamond film deposition device[D]. Taiyuan University of Technology, 2022
[2] Zheng Y, Liu J, Wang J, et al. The direct-current characteristics and surface repairing of a hydrogen terminated free-standing polycrystalline diamond in aqueous solutions[J]. Journal of Physics and Chemistry of Solids, 2019, 130: 111−119 doi: 10.1016/j.jpcs.2019.02.022
[3] May P W. Diamond thin films: a 21st-century material[J]. Philosophical Transactions of the Royal Society of London series A: Mathematical, Physical and Engineering Sciences, 2000, 358(1766): 473−495 doi: 10.1098/rsta.2000.0542
[4] Kamo M, Sato Y, Matsumoto S, et al. Diamond synthesis from gas phase in microwave plasma[J]. Journal of Crystal Growth, 1983, 62(3): 642−644 doi: 10.1016/0022-0248(83)90411-6
[5] 吕反修, 唐伟忠, 李成明, 等. 大面积光学级金刚石自支撑膜研究进展[J]. 红外技术, 2003(4): 1−7 (in Chinese) Lv F X, Tang W Z, Li C M, et al. Research progress on large-area optical-grade diamond self-supporting films[J]. Infrared Technology, 2003(4): 1−7
[6] Messier R, Badzian A R, Badzian T, et al. From diamond-like carbon to diamond coatings[J]. Thin Solid Films, 1987, 153(1-3): 1−9 doi: 10.1016/0040-6090(87)90164-7
[7] Nad S, Gu Y, Asmussen J, et al. Growth strategies for large and high-quality single crystal diamond substrates[J]. Diamond and Related Materials, 2015, 60: 26−34 doi: 10.1016/j.diamond.2015.09.018
[8] Wang B, Weng J, Wang Z T, et al. Investigation on the influence of the gas flow mode around substrate on the deposition of diamond films in an overmoded MPCVD reactor chamber[J]. Vacuum, 2020, 182: 109659 doi: 10.1016/j.vacuum.2020.109659
[9] Li L, Zhao C C, Zhang S L, et al. Simulation of diamond synthesis by microwave plasma chemical vapor deposition with multiple substrates in a substrate holder[J]. Journal of Crystal Growth, 2022, 579: 126457 doi: 10.1016/j.jcrysgro.2021.126457
[10] Füner M, Wild C, Koidl P, et al. Numerical simulations of microwave plasma reactors for diamond CVD[J]. Surface and Coatings Technology, 74–75 (1995) 221–226
[11] Hassouni K, Grotjohn T, Gicquel A, et al. Self-consistent microwave field and plasma discharge simulations for a moderate pressure hydrogen discharge reactor[J]. Journal of Applied Physics, 1999, 86(1): 134−151 doi: 10.1063/1.370710
[12] 金帅. 微波化学气相沉积腔内等离子体特性及反应过程数值模拟[D]. 哈尔滨工业大学, 2020 (in Chinese) Jin S. Numerical simulation of plasma characteristics and reaction process in microwave chemical vapor deposition cavity[D]. Harbin Institute of Technology, 2020
[13] 产思义, 屠菊萍, 黄珂, 等. 2英寸MPCVD光学级均匀金刚石膜的制备研究[J]. 无机材料学报, 2023, 38: 1413−1419 (in Chinese) Chan S Y, Tu J P, Huang K, et al. Preparation of 2-inch MPCVD optical-grade homogeneous diamond film[J]. Journal of Inorganic Materials, 2023, 38: 1413−1419
[14] Shivkumar G, Tholeti S S. Analysis of hydrogen plasma in a microwave plasma chemical vapor deposition reactor[J]. Journal of Applied Physics, 2016, 119(11): 113301-1−113301-13 doi: 10.1063/1.4943025
[15] Hassouni K, Silva F, Gicquel A, et al. Modelling of diamond deposition microwave cavity generated plasmas[J]. Journal of Physics D: Applied Physics, 2010, 43(15): 153001(45pp)
[16] Marques L, Jolly J, Alves L L, et al. Capacitively coupled radio-frequency hydrogen discharges: The role of kinetics[J]. Journal of Applied Physics, 2007, 102: 063305 doi: 10.1063/1.2779268
[17] Capitelli M, Ferreira C M, Gordiets B F, et al. Plasma kinetics in atmospheric gases[M]. Springer Science and Business Media, 2013
[18] 苏帆. CVD 金刚石膜可控性生长的研究[D]. 武汉工程大学, 2014 (in Chinese) Su F. Study on controllable growth of CVD diamond film[D]. Wuhan Institute of Technology, 2014
[19] Hagelaar G J M, Hassouni K, Gicquel A, et al. Interaction between the electromagnetic fields and the plasma in a microwave plasma reactor[J]. Journal of Applied Physics, 2004, 96(4): 1819−1828 doi: 10.1063/1.1769607
[20] 张斌华, 简小刚. MPCVD金刚石涂层均匀性生长的数值模拟与实验[J]. 金刚石与磨料磨具工程, 2024, 44(2): 161−168 (in Chinese) Zhang B H, Jian X G. Numerical simulation and experiment of uniform growth of MPCVD diamond coating[J]. Diamond and Abrasives Engineering, 2024, 44(2): 161−168