[1] Yu C, Gao K, Peng C W, He C R, Wang S B, Shi W, Allen V, Zhang J T, Wang D Z, Tian G Y, Zhang Y F, Jia W Z, Song Y H, Hu Y Z, Colwell J, Xing C F, Ma Q, Wu H T, Guo L Y, Dong G Q, Jiang H, Wu H H, Wang X Y, Xu D C, Li K, Peng J, Liu W Z, Chen D, Lennon A, Cao X M, De Wolf S, Zhou J, Yang X B, Zhang X H 2023 Nat. Energy 8 1375 doi: 10.1038/s41560-023-01388-4
[2] Crose M, Kwon J S I, Tran A, Christofides P D 2017 Renewable Energy 100 129 doi: 10.1016/j.renene.2016.06.065
[3] Crose M, Sang Il Kwon J, Nayhouse M, Ni D, Christofides P D 2015 Chem. Eng. Sci. 136 50 doi: 10.1016/j.ces.2015.02.027
[4] Schmidt H 2006 Ph. D Dissertation (Lausanne: EPFL
[5] Schmitt J P M 1989 Thin Solid Films 174 193 doi: 10.1016/0040-6090(89)90889-4
[6] Meyyappan M, Colgan M J 1996 J. Vac. Sci. Technol. A 14 2790 doi: 10.1116/1.580201
[7] Surendra M, Graves D B 1991 Appl. Phys. Lett 59 2091 doi: 10.1063/1.106112
[8] Curtins H, Wyrsch N, Favre M, Shah A V 1987 Plasma Chem Plasma P 7 267 doi: 10.1007/BF01016517
[9] Liu Y X, Zhang Q Z, Zhao K, Zhang Y R, Gao F, Song Y H, Wang Y N 2022 Chin. Phys. B 31 085202 doi: 10.1088/1674-1056/ac7551
[10] Kim H J, Lee H J 2017 J. Phys. D: Appl. Phys. 122 053301 doi: 10.1063/1.4996998
[11] Kim H J, Lee H J 2017 Plasma Sources Sci. Technol. 26 085003 doi: 10.1088/1361-6595/aa78b4
[12] Kim H J 2021 Vacuum 187 110104 doi: 10.1016/j.vacuum.2021.110104
[13] Kim H J, Lee H J 2016 Plasma Sources Sci. Technol. 25 065006 doi: 10.1088/0963-0252/25/6/065006
[14] Schmidt H, Sansonnens L, Howling A A, Hollenstein Ch, Elyaakoubi M, Schmitt J P M 2004 J. Appl. Phys. 95 4559 doi: 10.1063/1.1690096
[15] Sansonnens L, Pletzer A, Magni D, Howling A A, Hollenstein C, Schmitt J P M 1997 Plasma Sources Sci. Technol. 6 170 doi: 10.1088/0963-0252/6/2/010
[16] Lieberman M A, Booth J P, Chabert P, Rax J M, Turner M M 2002 Plasma Sources Sci. Technol. 11 283 doi: 10.1088/0963-0252/11/3/310
[17] Chabert P, Raimbault J L, Rax J M, Lieberman M A 2004 Phys. Plasmas 11 1775 doi: 10.1063/1.1688334
[18] Lee I, Graves D B, Lieberman M A 2008 Plasma Sources Sci. Technol. 17 015018 doi: 10.1088/0963-0252/17/1/015018
[19] Lieberman M A, Lichtenberg A J, Kawamura E, Marakhtanov A M 2015 Plasma Sources Sci. Technol. 24 055011 doi: 10.1088/0963-0252/24/5/055011
[20] Wen D Q, Kawamura E, Lieberman M A, Lichtenberg A J, Wang Y N 2017 J. Phys. D: Appl. Phys. 50 495201 doi: 10.1088/1361-6463/aa9627
[21] Zhao K, Liu Y X, Kawamura E, Wen D Q, Lieberman M A, Wang Y N 2018 Plasma Sources Sci. Technol. 27 055017 doi: 10.1088/1361-6595/aac242
[22] Lieberman M A, Kawamura E, Chabert P 2022 Plasma Sources Sci. Technol. 31 114007 doi: 10.1088/1361-6595/aca11f
[23] Liu J K, Zhang Y R, Zhao K, Wen D Q, Wang Y N 2021 Plasma Sci. Technol. 23 035401 doi: 10.1088/2058-6272/abe18f
[24] Liu Y X, Gao F, Liu J, Wang Y N 2014 J. Appl. Phys. 116 043303 doi: 10.1063/1.4891504
[25] Han D M, Liu Y X, Gao F, Wang X Y, Li A, Xu J, Jing Z G, Wang Y N 2018 J. Appl. Phys. 123 223304 doi: 10.1063/1.5024835
[26] Han D M, Su Z X, Zhao K, Liu Y X, Gao F, Wang Y N 2021 Plasma Sci. Technol. 23 055402 doi: 10.1088/2058-6272/abf72a
[27] Sansonnens L, Schmidt H, Howling A A, Hollenstein Ch, Ellert Ch, Buechel A 2006 J. Vac. Sci. Technol. A 24 1425 doi: 10.1116/1.2189266
[28] Chen Z, Rauf S, Collins K 2010 J. Appl. Phys. 108 073301 doi: 10.1063/1.3489950
[29] Faraz T, Arts K, Karwal S, Knoops H C M, Kessels W M M 2019 Plasma Sources Sci. Technol. 28 024002 doi: 10.1088/1361-6595/aaf2c7
[30] Kuboi N 2023 J. Micro/Nanopattern. Mats. Metro. 22 041502 doi: 10.1117/1.JMM.22.4.041502
[31] Oehrlein G S, Brandstadter S M, Bruce R L, et al. 2024 J. Vac. Sci. Technol. B 42 041501 doi: 10.1116/6.0003579
[32] Chang J, Chang J P 2017 J. Phys. D: Appl. Phys. 50 253001 doi: 10.1088/1361-6463/aa71c7
[33] 邱华檀, 王友年, 马腾才 2002 物理学报 51 1332 doi: 10.7498/aps.51.1332 Qiu H T, Wang Y N, Ma T C 2002 Acta Phys. Sin. 51 1332 doi: 10.7498/aps.51.1332
[34] Tinck S, Bogaerts A 2012 Plasma Processes & Polym. 9 522 doi: 10.1002/ppap.201100093
[35] Kessels W M M, Hoefnagels J P M, Boogaarts M G H, Schram D C, Van De Sanden M C M 2001 J. Appl. Phys. 89 2065 doi: 10.1063/1.1344911
[36] 刘建凯 2022 博士学位论文(大连: 大连理工大学) Liu J K 2022 Ph. D Dissertation (Dalian: Dalian University of Technology
[37] Sansonnens L 2005 J. Appl. Phys. 97 063304 doi: 10.1063/1.1862770
[38] Jia W Z, Wang X F, Song Y H, Wang Y N 2017 J. Phys. D: Appl. Phys. 50 165206 doi: 10.1088/1361-6463/aa6299
[39] Jia W Z, Liu R Q, Wang X F, Liu X M, Song Y H, Wang Y N 2018 Phys. Plasmas 25 093501 doi: 10.1063/1.5008586
[40] Bleecker K D, Bogaerts A, Gijbels R, Goedheer W 2004 Phys. Rev. E 69 056409 doi: 10.1103/PhysRevE.69.056409
[41] Brinkmann R P 2007 J. Appl. Phys. 102 093303 doi: 10.1063/1.2772499